INTEGRATED MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED DRIVING STRUCTURE
First Claim
1. An integrated MEMS gyroscope, comprising:
- an assembly of driving electrodes;
a first driving mass, configured to be driven to have a first driving movement along a first axis in response to biasing of the assembly of driving electrodes, said first driving movement being configured to generate a first sensing movement, in response to rotations of said integrated MEMS gyroscope;
a second driving mass, configured to be driven to have a second driving movement along a second axis in response to the assembly of driving electrodes, said second axis being transverse to said first axis, said second driving movement being configured to generate a second sensing movement, in response to the rotations of said integrated MEMS gyroscope; and
a first elastic coupling element, configured to elastically couple said first driving mass and said second driving mass and to couple said first driving movement to said second driving movement with a ratio of movement.
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Abstract
An integrated MEMS gyroscope, is provided with: at least a first driving mass driven with a first driving movement along a first axis upon biasing of an assembly of driving electrodes, the first driving movement generating at least one sensing movement, in the presence of rotations of the integrated MEMS gyroscope; and at least a second driving mass driven with a second driving movement along a second axis, transverse to the first axis, the second driving movement generating at least a respective sensing movement, in the presence of rotations of the integrated MEMS gyroscope. The integrated MEMS gyroscope is moreover provided with a first elastic coupling element, which elastically couples the first driving mass and the second driving mass in such a way as to couple the first driving movement to the second driving movement with a given ratio of movement.
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Citations
27 Claims
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1. An integrated MEMS gyroscope, comprising:
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an assembly of driving electrodes; a first driving mass, configured to be driven to have a first driving movement along a first axis in response to biasing of the assembly of driving electrodes, said first driving movement being configured to generate a first sensing movement, in response to rotations of said integrated MEMS gyroscope; a second driving mass, configured to be driven to have a second driving movement along a second axis in response to the assembly of driving electrodes, said second axis being transverse to said first axis, said second driving movement being configured to generate a second sensing movement, in response to the rotations of said integrated MEMS gyroscope; and a first elastic coupling element, configured to elastically couple said first driving mass and said second driving mass and to couple said first driving movement to said second driving movement with a ratio of movement. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An electronic device, comprising:
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an integrated MEMS gyroscope including; an assembly of driving electrodes; a first driving mass, configured to move in a first driving direction along a first axis in response to biasing of the assembly of driving electrodes, said first driving mass being configured to generate a first sensing movement, in response to rotations of said integrated MEMS gyroscope; a second driving mass, configured to move in a second driving direction along a second axis in response to the assembly of driving electrodes, said second axis being transverse to said first axis, said second driving mass being configured to generate a second sensing movement, in response to the rotations of said integrated MEMS gyroscope; and a first elastic coupling element, configured to elastically couple said first driving mass and said second driving mass in order to enable the first driving mass to move in the first driving direction and to enable the second driving mass to move in the second driving direction in a ratio of movement; and a driving stage coupled to said integrated MEMS gyroscope and configured to supply electrical biasing signals to said assembly of driving electrodes to drive said first driving mass and said second driving mass. - View Dependent Claims (18, 19, 20, 21)
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22. A MEMS gyroscope, comprising:
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a driving electrode; a first driving mass, configured to move in a first driving direction along a first axis in response to the driving electrode; a second driving mass, configured to move in a second driving direction along a second axis, the second axis being transverse to the first axis; and a first elastic coupling element coupled between the first driving mass and the second driving mass, the first elastic coupling element being configured to move the second driving mass in the second driving direction in response to the driving electrode moving the first driving mass in the first driving direction. - View Dependent Claims (23, 24)
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25. A method, comprising:
forming a MEMS gyroscope, the forming including; forming a first driving mass having a first yaw sensing mass and a first roll sensing mass, the first driving mass configured to move in a first driving direction along a first axis; forming a second driving mass having a second yaw sensing mass and a first pitch sensing mass, the second driving mass configured to move in a second driving direction along a second axis transverse to the first axis; and forming an elastic coupling element between the first and second driving masses, the elastic coupling element configured to move the second driving mass in the second driving direction in response to a first driving movement of the first driving mass in the first driving direction. - View Dependent Claims (26, 27)
Specification