CAPACITIVE SENSOR AND MANUFACTURING METHOD THEREOF
First Claim
1. A capacitive sensor, comprising:
- a substrate;
a plurality of electrodes, including;
at least one first electrode and at least one second electrode respectively disposed on the substrate, wherein the second electrode surrounds the first electrode;
at least one anchor base disposed on the substrate and around the electrodes;
a sensing device disposed above the first electrode;
at least one movable frame surrounding the sensing device and disposed above the second electrode; and
a plurality of spring members, including;
a plurality of first spring members connecting the anchor base and the movable frame;
a plurality of second spring members connecting the sensing device and the movable frame.
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Accused Products
Abstract
A capacitive sensor includes a substrate, at least one first electrode, at least one second electrode, a sensing device, at least one anchor base, at least one movable frame, and a plurality of spring members. The first and second electrodes are disposed on the substrate, and the anchor base surrounds the first and second electrodes and is disposed on the substrate. The movable frame surrounds the sensing device. Some of the spring members connect the movable frame and the sensing device, and the other spring members connect the movable frame and the anchor base. The sensing device and the first electrode are both sensing electrodes. The movable frame is disposed above the second electrode, and cooperates with the second electrode to act as a capacitive driver.
66 Citations
24 Claims
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1. A capacitive sensor, comprising:
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a substrate; a plurality of electrodes, including; at least one first electrode and at least one second electrode respectively disposed on the substrate, wherein the second electrode surrounds the first electrode; at least one anchor base disposed on the substrate and around the electrodes; a sensing device disposed above the first electrode; at least one movable frame surrounding the sensing device and disposed above the second electrode; and a plurality of spring members, including; a plurality of first spring members connecting the anchor base and the movable frame; a plurality of second spring members connecting the sensing device and the movable frame. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method for manufacturing a capacitive sensor, comprising:
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providing a first wafer-based substrate having a surface on which a base layer is disposed; etching the base layer to form a plurality of cavities sequentially, wherein the depths of the cavities are different; providing a second wafer-based substrate on which a first electrode and a second electrode are disposed; bonding the unetched surface of the base layer to the second substrate; removing the first substrate; and etching the base layer to form a sensing device, at least one movable frame, a plurality of spring members, and at least one anchor base, wherein the anchor base surrounds the first and second electrodes and is disposed on the second substrate, the movable frame surrounds the sensing device, some of the spring members connect the movable frame and the sensing device, and the other spring members connect the movable frame and the anchor base. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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Specification