MASK FRAME ASSEMBLY FOR THIN LAYER DEPOSITION AND ORGANIC LIGHT EMITTING DISPLAY DEVICE

• US 20110157575A1
• Filed: 12/20/2010
• Published: 06/30/2011
• Est. Priority Date: 12/15/2009
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Mobile Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Lee, Sang-Shin
• Granted Patent: US 8,852,346 B2
• Time in Patent Office: Days
• US Class Current: 355/72
• CPC Class Codes: B05C 21/005 Masking devices stencils B05C17/06; masking devices for which the means for applying liquids or other fluent material is spraying or is not important B05B12/20
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: H10K 59/35 comprising red-green-blue [RGB] subpixels
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/166 using selective deposition, e.g. using a mask

Abstract

A mask frame assembly for thin film deposition is disclosed. In one embodiment, the assembly includes: a frame, and a plurality of unit mask strips attached to the frame, wherein each of the unit mask strips includes a plurality of unit masking patterns which are spaced apart from each other. In one embodiment, each of the unit masking patterns includes: i) a plurality of stripe pattern slits and ii) a plurality of sets of dot pattern slits each set formed to be substantially parallel with the stripe pattern slits. Further, the stripe pattern slits and the sets of dot pattern slits are alternately formed with respect to each other, wherein each set of the dot pattern slits includes a plurality of dot pattern slits, and wherein the length of each stripe pattern slit is substantially the same as the length of each set of the dot pattern slits.

Claims

1. A mask frame assembly for thin film deposition comprising:

a frame, wherein an opening is defined in the frame; and

a plurality of unit mask strips which extend in a first direction to be substantially parallel with each other and attached to the frame such that the unit mask strips cross the opening of the frame,

wherein each of the unit mask strips comprises a plurality of unit masking patterns which are spaced apart from each other and extend in a second direction substantially perpendicular to the first direction, wherein each of the unit masking patterns comprises;

i) a plurality of stripe pattern slits each of which extends in the second direction and ii) a plurality of sets of dot pattern slits each set formed to be substantially parallel with the stripe pattern slits, wherein the stripe pattern slits and the sets of dot pattern slits are alternately formed with respect to each other,

wherein each set of the dot pattern slits comprises a plurality of dot pattern slits, and wherein the length of each stripe pattern slit is substantially the same as the length of each set of the dot pattern slits.

2. The mask frame assembly for thin film deposition of claim 1, wherein the stripe pattern slits and the sets of dot pattern slits are formed to be substantially symmetrical to each other with respect to a central axis of the unit masking patterns, and wherein the central axis is substantially parallel with the second direction.

3. The mask frame assembly for thin film deposition of claim 2, wherein at least one of the stripe pattern slits is disposed in both ends of the unit masking patterns.

4. The mask frame assembly for thin film deposition of claim 3, wherein the dot pattern slits of each set are substantially evenly spaced apart from each other, and wherein at least one set of the dot pattern slits is disposed between the adjacent stripe pattern slits.

5. The mask frame assembly for thin film deposition of claim 4, wherein two sets of the dot pattern slits are disposed between the adjacent stripe pattern slits.

6. The mask frame assembly for thin film deposition of claim 3, wherein the dot pattern slits of each set are divided by a plurality of blocking bridges, and wherein the blocking bridges have substantially the same length.

7. The mask frame assembly for thin film deposition of claim 2, wherein at least one set of the dot pattern slits is disposed in both end portions of the unit masking patterns.

8. The mask frame assembly for thin film deposition of claim 7, wherein at least two of the stripe pattern slits are disposed between the adjacent sets of the dot pattern slits.

9. The mask frame assembly for thin film deposition of claim 1, wherein the unit mask stripes are formed of nickel or a nickel alloy.

10. The mask frame assembly for thin film deposition of claim 1, wherein each of the unit mask stripes further comprises a blocking portion which surrounds the unit masking patterns.

11. An organic light emitting display device comprising:

a first electrode and a second electrode that face each other; and

an intermediate layer comprising at least an organic light emitting layer disposed between the first electrode and the second electrode,

wherein a plurality of stripe patterns and a plurality of sets of dot patterns are formed in the intermediate layer, wherein each set of the dot patterns is formed to be substantially parallel with the stripe patterns, wherein the stripe patterns and the sets of dot patterns are alternately formed with respect to each other, wherein each set of the dot patterns comprises a plurality of dot patterns, and wherein the length of each stripe patterns is substantially the same as the length of each set of the dot patterns.

12. The organic light emitting display device of claim 11, wherein at least one of the stripe patterns is formed in both end portions of the organic light emitting display device.

13. The organic light emitting display device of claim 11, wherein at least one set of the dot patterns is formed in both end portions of the organic light emitting display device.

14. The organic light emitting display device of claim 11, wherein the organic light emitting layer comprises red, green, and blue light emitting layers, wherein the organic light emitting layer corresponds to a unit pixel, and wherein the red, green, and blue light emitting layers correspond to three sub-pixels, respectively, and

wherein the stripe patterns and the sets of dot patterns correspond to at least one unit pixel.

15. The organic light emitting display device of claim 14, wherein at least one set of the dot patterns corresponds to one of the three sub-pixels.

16. The organic light emitting display device of claim 14, wherein at least one set of the dot patterns corresponds to a plurality of sub-pixels.

17. The organic light emitting display device of claim 11, wherein the dot patterns of each set are substantially evenly spaced apart from each other.

18. A mask frame assembly for thin film deposition comprising:

a mask frame, wherein an opening is defined in the mask frame; and

a plurality of unit mask strips which extend in a first direction to be substantially parallel with each other and cross the opening of the mask frame,

wherein each of the unit mask strips comprises a plurality of unit masking patterns which are spaced apart from each other and extend in a second direction substantially perpendicular to the first direction,

wherein each of the unit masking patterns comprises;

i) a plurality of stripe pattern slits each of which extends in the second direction and ii) a plurality of sets of dot pattern slits each set formed to be substantially parallel with the stripe pattern slits, wherein the stripe pattern slits and the sets of dot pattern slits are alternately formed with respect to each other,

wherein each set of the dot pattern slits comprises a plurality of dot pattern slits, wherein the length of each stripe pattern slit is substantially the same as the length of each set of the dot pattern slits, and wherein all of the unit masking patterns have substantially the same slit arrangement.

19. The mask frame assembly for thin film deposition of claim 18, wherein the stripe pattern slits and the sets of dot pattern slits are formed to be substantially symmetrical to each other with respect to a central axis of the unit masking patterns, and wherein the central axis is substantially parallel with the second direction.

20. The mask frame assembly for thin film deposition of claim 18, wherein at least one of the stripe pattern slits is disposed in both ends of the unit masking patterns.