Rotary Interferometer

• US 20110157595A1
• Filed: 12/30/2009
• Published: 06/30/2011
• Est. Priority Date: 12/30/2009
• Status: Abandoned Application

• Current Assignee: Mitsubishi Electric Research Laboratories, Inc. (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Electric Research Laboratories, Inc. (Mitsubishi Electric Corporation)
• Inventors: Waters, Richard C., Yerazunis, William S.
• Application Number:
  US12/650,322
• Publication Number:
  US 20110157595A1
• Time in Patent Office: Days
• US Class Current: 356/455
• CPC Class Codes: G01B 11/26 for measuring angles or tapers; for testing the alignment of axes
• CPC Class Codes: G01B 2290/15 Cat eye, i.e. reflection always parallel to incoming beam
• CPC Class Codes: G01B 2290/45 Multiple detectors for detecting interferometer signals
• CPC Class Codes: G01B 2290/70 Using polarization in the interferometer
• CPC Class Codes: G01B 9/02018 Multipass interferometers, e.g. double-pass
• CPC Class Codes: G01B 9/02056 Passive reduction of errors
• CPC Class Codes: G01B 9/02081 simultaneous quadrature detection, e.g. by spatial phase shifting

Abstract

An angular displacement of an object is measured interferometrically by splitting a laser beam into a reference beam and a measuring beam. The reference beam is directed at a stationary reference retroreflector and then a phase shift detector. The measuring beam is directed at a rotatable reflective surface of the object and then a stationary measuring retroreflector and then back to the rotatable reflective surface and then to the phase shift detector such that the phase shift detector measures an angular displacement of the rotatable reflective surface when the length of the path of the measuring beam changes when the rotatable reflective surface is displaced.

Claims

1. An apparatus for measuring an angular displacement of an object interferometrically, comprising:

means for generating a laser beam; and

means for splitting the laser beam into a reference beam and a measuring beam, wherein the reference beam is directed at a stationary reference retroreflector and then a phase shift detector, and wherein the measuring beam is directed at a rotatable reflective surface of the object and then a stationary measuring retroreflector and then back to the rotatable reflective surface and then to the phase shift detector such that the phase shift detector measures an angular displacement of the rotatable reflective surface when a length of a path of the measuring beam changes when the rotatable reflective surface is displaced.

2. The apparatus of claim 1, further comprising:

a beam expander placed in a path of the laser beam.

3. The apparatus of claim 2, wherein the beam expander is a Gallean telescope with one negative lens and one positive lens.

4. The apparatus of claim 2, wherein the beam expander is a Keplerian telescope with a pair of positive lenses.

5. The apparatus of claim 1, wherein the rotatable reflective surface is a polished surface of the object.

6. The apparatus of claim 1, wherein the rotatable reflective surface is a mirror arranged on a surface of the object.

7. The apparatus of claim 1, wherein the displacement is angular along an arc.

8. The apparatus of claim 2, wherein the phase shift detector further comprises:

an aperture plate placed in the path of the measuring beam.

9. The apparatus of claim 1, further comprising:

an optical assembly placed in the path of the measuring beam to increase a difference in phase shift between the reference beam and the measuring beam.

10. The apparatus of claim 1, further comprising:

a multiple reflection optical assembly placed in the path of the measuring beam to increase a range of angles that can be measured.

11. The apparatus of claim 1, further comprising:

a multiple reflection optical assembly placed in a path of the measuring beam to increase a difference in phase shift between the reference beam and the measuring beam due to a given change in angle of the rotatable reflective surface.

12. An apparatus for measuring an angular displacement of an object interferometrically, comprising:

means for generating a laser beam; and

means for splitting the laser beam into a reference beam and a measuring beam, wherein the reference beam is directed at a stationary reference retroreflector and then a phase shift detector, and wherein the measuring beam is directed at a rotatable reflective surface of the object and then a stationary measuring retroreflector and then back to the rotatable reflective surface and then to a stationary planar reflecting surface and then back to the rotatable reflective surface and then back to a stationary retroreflector and then back to the rotatable surface and then to the phase shift detector such that the phase shift detector measures an angular displacement of the rotatable reflective surface when a length of a path of the measuring beam changes when the rotatable reflective surface is displaced.

13. A method for measuring an angular displacement of an object interferometrically, comprising the steps of:

generating a laser beam;

directing the laser beam at a beam splitter to produce a reference beam and a measuring beam;

directing the reference beam at a stationary reference retroreflector and then a phase shift detector; and

directing the measuring beam at a rotatable reflective surface of the object and then a stationary measuring retroreflector and then back to the rotatable reflective surface and then to the phase shift detector such that the phase shift detector measures an angular displacement of the rotatable reflective surface when the length of the path of the measuring beam changes when the rotatable reflective surface is displaced.

14. A method for measuring an angular displacement of an object interferometrically, comprising the steps of:

generating a laser beam;

directing the laser beam at a beam splitter to produce a reference beam and a measuring beam;

directing the reference beam at a stationary reference retroreflector and then a phase shift detector; and

directing the measuring beam at a rotatable reflective surface of the object and then a stationary measuring retroreflector and then back to the rotatable reflective surface and then to a stationary measuring planar reflector and then back to the rotatable reflective surface and then back to the stationary measuring retroreflector and then back to the rotatable reflective surface and then to the phase shift detector such that the phase shift detector measures an angular displacement of the rotatable reflective surface when the length of the path of the measuring beam changes when the rotatable reflective surface is displaced.