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ELECTROSTATIC CHUCK WITH REDUCED ARCING

  • US 20110157760A1
  • Filed: 09/17/2010
  • Published: 06/30/2011
  • Est. Priority Date: 11/20/2009
  • Status: Active Grant
First Claim
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1. An electrostatic chuck, comprising:

  • a body having a notched upper peripheral edge, defined by a first surface perpendicular to a sidewall of the body and a stepped second surface disposed between the first surface and an upper surface of the body, and a plurality of holes disposed through the body along the first surface of the notched upper peripheral edge;

    a plurality of fasteners disposed through respective ones of the plurality of holes to couple the body to a base disposed beneath the body;

    a dielectric member disposed above the upper surface of the body to electrostatically retain a substrate disposed thereon;

    an insulator ring disposed about the body and within the notched upper peripheral edge, the insulator ring having a stepped inner sidewall that mates with the stepped second surface of the notched upper peripheral edge to define a non-linear interface therebetween; and

    an edge ring disposed over the insulator ring, wherein the non-linear interface limits arcing between the edge ring and the fastener when RF power is applied to the electrostatic chuck.

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