SUBSTRATE HOLDING MEMBER, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
1 Assignment
0 Petitions
Accused Products
Abstract
A substrate processing apparatus includes a tray, a mask and a rotary stage. The tray includes a substrate support configured to support an outer edge portion of a substrate, a mask support provided on an outer periphery side of the substrate support and projected above the substrate support, and a recess provided between the substrate support and the mask support. The mask covers the recess and the substrate support of the tray. The rotary stage includes an electrostatic adsorption surface and a tray mounting portion provided on an outer periphery side of the electrostatic adsorption surface and below the electrostatic adsorption surface. The outer edge portion of the substrate is projected toward the tray mounting portion side from the electrostatic adsorption surface. The substrate support is spaced below the outer edge portion of the substrate. The mask is spaced above the outer edge portion of the substrate.
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Citations
15 Claims
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1-5. -5. (canceled)
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6. A substrate processing apparatus comprising:
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a ring-shaped tray including a substrate support configured to support an outer edge portion of a substrate, a mask support provided on an outer periphery side of the substrate support and projected above the substrate support, and a recess provided between the substrate support and the mask support; a ring-shaped mask covering the recess and the substrate support of the tray with the mask being superposed on the mask support of the tray; and a rotary stage including an electrostatic adsorption surface and a tray mounting portion provided on an outer periphery side of the electrostatic adsorption surface and below the electrostatic adsorption surface, the outer edge portion of the substrate being projected toward the tray mounting portion side from the electrostatic adsorption surface, the substrate support being spaced below the outer edge portion of the substrate and the mask being spaced above the outer edge portion of the substrate with the substrate being adsorbed onto the electrostatic adsorption surface and the tray being mounted on the tray mounting portion. - View Dependent Claims (7, 8, 9, 10, 11)
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12. A substrate processing method comprising:
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transferring a ring-shaped tray and a ring-shaped mask toward a rotary stage, the tray including a substrate support and a mask support provided on an outer periphery side of the substrate support and projected above the substrate support, an outer edge portion of a substrate being supported on the substrate support, the mask being superposed on the mask support and covering the outer edge portion of the substrate, the rotary stage including an electrostatic adsorption surface and a tray mounting portion provided on an outer periphery side of the electrostatic adsorption surface and below the electrostatic adsorption surface; processing on the substrate while rotating the rotary stage, with the substrate being adsorbed onto the electrostatic adsorption surface, the tray being mounted on the tray mounting portion, the substrate support being spaced below the outer edge portion projected toward the tray mounting portion side from the electrostatic adsorption surface and the mask being spaced above the outer edge portion; and after the processing of the substrate, canceling an electrostatic adsorption force acting on the substrate while maintain a state where the tray is mounted on the tray mounting portion and the mask is superposed on the mask support. - View Dependent Claims (13, 14, 15)
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Specification