ADVANCED HIGH EFFICIENTCY CRYSTALLINE SOLAR CELL FABRICATION METHOD

• US 20110162703A1
• Filed: 03/19/2010
• Published: 07/07/2011
• Est. Priority Date: 03/20/2009
• Status: Abandoned Application

• Current Assignee: Intevac
• Original Assignee: Solar Implant Technologies, Inc. (Intevac, Inc.)
• Inventors: Murrer, Edward S., Hieslmair, Henry, Adibi, Babak
• Application Number:
  US12/728,105
• Publication Number:
  US 20110162703A1
• Time in Patent Office: Days
• US Class Current: 136/256
• CPC Class Codes: H01L 21/26513 of electrically active species
• CPC Class Codes: H01L 31/022425 for solar cells
• CPC Class Codes: H01L 31/022433 Particular geometry of the grid contacts
• CPC Class Codes: H01L 31/022441 Electrode arrangements specially adapted for back-contact solar cells
• CPC Class Codes: H01L 31/068 the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
• CPC Class Codes: H01L 31/0682 back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
• CPC Class Codes: H01L 31/1804 comprising only elements of Group IV of the Periodic Table
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A method of fabricating a solar cell comprising: providing a semiconducting wafer having a front surface, a back surface, and a background doped region; performing a set of ion implantations of dopant into the semiconducting wafer to form a back alternatingly-doped region extending from the back surface of the semiconducting wafer to a location between the back surface and the front surface, wherein the back doped region comprises laterally alternating first back doped regions and second back doped regions, and wherein the first back doped regions comprise a different charge type than the second back doped regions and the background doped region; and disposing a back metal contact layer onto the back surface of the semiconducting wafer, wherein the back metal contact layer is aligned over the first and second back doped regions and is configured to conduct electrical charge from the first and second back doped regions.

Claims

1. A solar cell comprising:

a semiconducting wafer having a front surface, a back surface, and a background doped region between the front surface and the back surface;

a front alternatingly-doped region extending from the front surface of the semiconducting wafer to a location between the front surface and the back surface, wherein the front doped region comprises laterally alternating first front doped regions and second front doped regions, the second front doped regions having a lower sheet resistance than the first front doped regions, and wherein a p-n junction is formed between the first front doped regions and the background doped region;

a plurality of front metal contacts aligned over the second front doped regions, wherein the front metal contacts are configured to conduct electrical charge from the second front doped regions;

a back alternatingly-doped region extending from the back surface of the semiconducting wafer to a location between the back surface and the front surface, wherein the back doped region comprises laterally alternating first back doped regions and second back doped regions, the second back doped regions having a lower sheet resistance than the first back doped regions; and

a back metal contact layer disposed on the back surface of the semiconducting wafer, wherein the back metal contact layer covers the first back doped regions and the second back doped regions and is configured to conduct electrical charge from the second back doped regions.

2. The solar cell of claim 1, wherein the semiconducting wafer is a silicon substrate.

3. The solar cell of claim 1, wherein the first front doped regions and the first back doped regions have a sheet resistance between approximately 80 Ohms/square and approximately 160 Ohms/square.

4. The solar cell of claim 1, wherein the second front doped regions and the second back doped regions have a sheet resistance between approximately 10 Ohms/square and approximately 40 Ohms/square.

5. The solar cell of claim 1, wherein:

the first front doped regions and the first back doped regions have a sheet resistance between approximately 80 Ohms/square and approximately 160 Ohms/square; and

the second front doped regions and the second back doped regions have a sheet resistance between approximately 10 Ohms/square and approximately 40 Ohms/square.

6. The solar cell of claim 5, wherein the background doped region has a sheet resistance between approximately 0.5 Ohms/square and approximately 1.5 Ohms/square.

7. The solar cell of claim 1, further comprising an anti-reflective coating layer disposed on the front surface of the semiconducting wafer over the first front doped regions.

8. The solar cell of claim 1, further comprising a metallic seed layer disposed over the second front doped regions and under the front metal contacts.

9. The solar cell of claim 8, wherein the metallic seed layer comprises mesotaxy implants.

10. The solar cell of claim 8, wherein the metallic seed layer comprises a silicide.

11. The solar cell of claim 1, wherein the second front doped regions are laterally spaced apart from one another a distance in the range of approximately 1 mm to approximately 3 mm.

12. The solar cell of claim 1, wherein:

the background doped region is p-type doped; and

the first front doped regions and the second front doped regions are n-type doped.

13. The solar cell of claim 12, wherein the second back doped regions are doped with the same charge-type dopant as the background doped region.

14. The solar cell of claim 13, wherein the first back doped regions are doped with the same charge-type dopant as the second back doped regions and the background doped region.

15. The solar cell of claim 13, wherein the second back doped regions and the background doped region are p-type doped.

16. The solar cell of claim 15, wherein the second back doped regions are doped with boron.

17. A method of fabricating a solar cell, the method comprising:

providing a semiconducting wafer having a front surface, a back surface, and a background doped region between the front surface and the back surface;

performing a first set of ion implantations of dopant into the semiconducting wafer to form a front alternatingly-doped region extending from the front surface of the semiconducting wafer to a location between the front surface and the back surface, wherein the front doped region comprises laterally alternating first front doped regions and second front doped regions, the second front doped regions having a lower sheet resistance than the first front doped regions, and wherein a p-n junction is formed between the first front doped regions and the background doped region;

disposing a plurality of front metal contacts on the semiconducting wafer, wherein the front metal contacts are aligned over the second front doped regions and are configured to conduct electrical charge from the second front doped regions;

performing a second set of ion implantations of dopant into the semiconducting wafer to form a back alternatingly-doped region extending from the back surface of the semiconducting wafer to a location between the back surface and the front surface, wherein the back doped region comprises laterally alternating first back doped regions and second back doped regions, the second back doped regions having a lower sheet resistance than the first back doped regions; and

disposing a back metal contact layer onto the back surface of the semiconducting wafer, wherein the back metal contact layer covers the first back doped regions and the second back doped regions and is configured to conduct electrical charge from the second back doped regions.

18. The method of claim 17, wherein performing the first set of ion implantations comprises implanting the second front doped regions using a resist layer that comprises resist openings that are aligned with the locations on the semiconducting wafer where the second front doped regions are to be implanted.

19. The method of claim 18, wherein the resist openings are formed using a contact mask placed in contact with the resist layer, the contact mask comprising mask openings that are aligned with the locations in the resist layer where the resist openings are to be formed.

20. The method of claim 17, wherein performing the second set of ion implantations comprises implanting the second back doped regions using a shadow mask that comprises mask openings that are aligned with the locations on the semiconducting wafer where the second back doped regions are to be implanted, and the shadow mask is disposed a predetermined distance away from the back surface of the semiconducting wafer during a portion of the second set of ion implantations.

21. The method of claim 17, wherein the semiconducting wafer is a silicon substrate.

22. The method of claim 17, wherein the first front doped regions and the first back doped regions have a sheet resistance between approximately 80 Ohms/square and approximately 160 Ohms/square.

23. The method of claim 17, wherein the second front doped regions and the second back doped regions have a sheet resistance between approximately 10 Ohms/square and approximately 40 Ohms/square.

24. The method of claim 17, wherein:

the first front doped regions and the first back doped regions have a sheet resistance between approximately 80 Ohms/square and approximately 160 Ohms/square; and

the second front doped regions and the second back doped regions have a sheet resistance between approximately 10 Ohms/square and approximately 40 Ohms/square.

25. The method of claim 24, wherein the background doped region has a sheet resistance between approximately 0.5 Ohms/square and approximately 1.5 Ohms/square.

26. The method of claim 17, further comprising the step of disposing an anti-reflective coating layer on the front surface of the semiconducting wafer over the first front doped regions.

27. The method of claim 17, further comprising the step of disposing a metallic seed layer over the second front doped regions, wherein the front metal contacts are disposed over the metallic seed layer.

28. The method of claim 27, wherein the metallic seed layer comprises mesotaxy implants.

29. The method of claim 27, wherein the metallic seed layer comprises a silicide.

30. The method of claim 17, wherein the second front doped regions are laterally spaced apart from one another a distance in the range of approximately 1 mm to approximately 3 mm.

31. The method of claim 17, wherein:

the background doped region is p-type doped; and

the first front doped regions and the second front doped regions are n-type doped.

32. The method of claim 17, wherein the second back doped regions are doped with the same charge-type dopant as the background doped region.

33. The method of claim 32, wherein the first back doped regions are doped with the same charge-type dopant as the second back doped regions and the background doped region.

34. The method of claim 32, wherein the second back doped regions and the background doped region are p-type doped.

35. The method of claim 34, wherein the second back doped regions are doped with boron.

36. A solar cell comprising:

a semiconducting wafer having a front surface, a back surface, and a background doped region between the front surface and the back surface;

a back alternatingly-doped region extending from the back surface of the semiconducting wafer to a location between the back surface and the front surface, wherein the back doped region comprises laterally alternating first back doped regions and second back doped regions, and wherein the first back doped regions comprise a different charge type than the second back doped regions and the background doped region; and

a back metal contact layer disposed on the back surface of the semiconducting wafer, wherein the back metal contact layer is aligned over the first and second back doped regions and is configured to conduct electrical charge from the first and second back doped regions.

37. The solar cell of claim 36, wherein the front surface of the semiconducting wafer is characterized by an absence of any metal contacts, thereby eliminating any front surface shadowing by metal contacts.

38. The solar cell of claim 36, wherein:

the background doped region is n-type doped;

the first back doped regions are p-type doped; and

the second back doped regions are n-type doped.

39. The solar cell of claim 38, wherein the first back doped regions are doped with a dopant chosen from the group consisting of:

boron, aluminum, and gallium.

40. The solar cell of claim 38, wherein the second back doped regions are doped with a dopant chosen from the group consisting of:

phosphorous, arsenic, and antimony.

41. The solar cell of claim 36, wherein the semiconducting wafer is a silicon substrate.

42. The solar cell of claim 36, further comprising a front doped region extending from the front surface of the semiconducting wafer to a location between the front surface and the back surface, wherein the front doped region does not extend to or past the location of the back alternatingly-doped region.

43. The solar cell of claim 42, wherein the front doped region is p-type doped.

44. The solar cell of claim 36, wherein the back metal contact layer comprises metal contact gridlines aligned over the first and second back doped regions.

45. The solar cell of claim 44, further comprising an anti-reflective coating layer disposed over the back surface of the semiconducting wafer and between the metal contact gridlines.

46. The solar cell of claim 45, wherein the anti-reflective coating layer comprises silicon nitride.

47. The solar cell of claim 36, further comprising an anti-reflective coating layer disposed over the front surface of the semiconducting wafer.

48. The solar cell of claim 47, wherein the anti-reflective coating layer comprises silicon nitride.

49. A method of fabricating a solar cell, the method comprising:

providing a semiconducting wafer having a front surface, a back surface, and a background doped region between the front surface and the back surface;

performing a set of ion implantations of dopant into the semiconducting wafer to form a back alternatingly-doped region extending from the back surface of the semiconducting wafer to a location between the back surface and the front surface, wherein the back doped region comprises laterally alternating first back doped regions and second back doped regions, and wherein the first back doped regions comprise a different charge type than the second back doped regions and the background doped region; and

disposing a back metal contact layer onto the back surface of the semiconducting wafer, wherein the back metal contact layer is aligned over the first and second back doped regions and is configured to conduct electrical charge from the first and second back doped regions.

50. The method of claim 49, wherein the step of performing a set of ion implantations of dopant into the semiconducting wafer to form a back alternatingly-doped region comprises:

performing a blanket ion implantation of a first dopant into the semiconducting wafer, wherein the first dopant is implanted across the entire back surface of the semiconducting wafer; and

performing a masked ion implantation of a second dopant into the semiconducting wafer using a shadow mask disposed a predetermined distance away from the back surface of the semiconducting wafer, wherein the shadow mask comprises mask openings that are aligned with the locations on the semiconducting wafer where the second back doped regions are to be implanted.

51. The method of claim 49, wherein the step of performing a set of ion implantations of dopant into the semiconducting wafer to form a back alternatingly-doped region comprises:

performing a first masked ion implantation of a first dopant into the semiconducting wafer using a shadow mask disposed a predetermined distance away from the back surface of the semiconducting wafer, wherein the shadow mask comprises mask openings that are aligned with the locations on the semiconducting wafer where the first back doped regions are to be implanted; and

performing a second masked ion implantation of a second dopant into the semiconducting wafer using a shadow mask disposed a predetermined distance away from the back surface of the semiconducting wafer, wherein the shadow mask comprises mask openings that are aligned with the locations on the semiconducting wafer where the second back doped regions are to be implanted.

52. The method of claim 49, wherein:

the background doped region is n-type doped;

the first back doped regions are p-type doped; and

the second back doped regions are n-type doped.

53. The method of claim 52, wherein the first back doped regions are doped with a dopant chosen from the group consisting of:

boron, aluminum, and gallium.

54. The method of claim 52, wherein the second back doped regions are doped with a dopant chosen from the group consisting of:

phosphorous, arsenic, and antimony.

55. The method of claim 49, wherein the semiconducting wafer is a silicon substrate.

56. The method of claim 49, further comprising the step of performing an ion implantation of a dopant into the semiconducting wafer to form a front doped region extending from the front surface of the semiconducting wafer to a location between the front surface and the back surface, wherein the front doped region does not extend to or past the location of the back alternatingly-doped region.

57. The method of claim 56, wherein the front doped region is p-type doped.

58. The method of claim 49, further comprising the step of depositing an anti-reflective coating layer over the front surface and the back surface of the semiconducting wafer.

59. The method of claim 58, wherein the anti-reflective coating layer is deposited using a Plasma-Enhanced Chemical Vapor Deposition (PECVD) process.

60. The method of claim 58, wherein the anti-reflective coating layer comprises silicon nitride.

61. The method of claim 58, wherein the step of disposing the back metal contact layer onto the back surface of the semiconducting wafer comprises:

ablating the anti-reflective coating layer to form separated openings in the anti-reflective coating layer over the first and second back doped regions; and

depositing metal contacts within the separated openings.

62. The method of claim 61, wherein the step of disposing the back metal contact layer onto the back surface of the semiconducting wafer further comprises performing an electroplating process after the metal contacts have been deposited within the separated openings.