RECONFIGURABLE MULTI-ZONE GAS DELIVERY HARDWARE FOR SUBSTRATE PROCESSING SHOWERHEADS

• US 20110162800A1
• Filed: 10/06/2010
• Published: 07/07/2011
• Est. Priority Date: 12/04/2009
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Noorbakhsh, Hamid, Carducci, James D.
• Granted Patent: US 9,540,731 B2
• Time in Patent Office: Days
• US Class Current: 156/345.34
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: Y10T 29/49716 Converting

Abstract

Reconfigurable showerheads used in process chambers for substrate processing are provided herein. In some embodiments, a reconfigurable showerhead may include a body having one or more plenums disposed therein; and one or more inserts configured to be disposed within the one or more plenums, wherein the one or more inserts divide the reconfigurable showerhead into a plurality of zones. In some embodiments, a substrate processing system may include a process chamber having a reconfigurable showerhead coupled to a gas supply for providing one or more process gases to the process chamber, the reconfigurable showerhead including a body having one or more plenums disposed therein and one or more inserts configured to be disposed within the one or more plenums, wherein the one or more inserts divide the reconfigurable showerhead into a plurality of zones.

Claims

1. A reconfigurable showerhead, comprising:

a body having one or more plenums disposed therein; and

one or more inserts configured to be disposed within the one or more plenums, wherein the one or more inserts divide the reconfigurable showerhead into a plurality of zones.

2. The reconfigurable showerhead of claim 1, wherein the body comprises a first plate removably coupled to a second plate, and wherein at least one of the first plate and second plate comprise one or more recesses formed therein to form the one or more plenums.

3. The reconfigurable showerhead of claim 1, wherein the body further comprises a plurality of passageways formed therein, wherein the plurality of passageways are configured to allow a flow of gas from a gas supply to the one or more plenums.

4. The reconfigurable showerhead of claim 1, wherein the body further comprises a plurality of conduits coupling the one or more plenums to a substrate-facing surface of the reconfigurable showerhead.

5. The reconfigurable showerhead of claim 4, further comprising:

a faceplate disposed adjacent to the substrate-facing side of the body, wherein the faceplate comprises a plurality of holes corresponding to the plurality of conduits formed therein.

6. The reconfigurable showerhead of claim 5, further comprising:

a recess formed in at least one of the faceplate or the substrate-facing side body, wherein the recess is coupled between one conduit of the plurality of conduits and at least one of the plurality of holes.

7. The reconfigurable showerhead of claim 1, wherein the one or more inserts comprise one or more flow paths formed therein to allow a flow of gas therethrough.

8. The reconfigurable showerhead of claim 7, wherein the one or more inserts further comprise a body and a cap, wherein the a first portion of the one or more flow paths is formed in the body and a second portion of the one or more flow paths is formed in the cap.

9. The reconfigurable showerhead of claim 7, further comprising:

one or more seals disposed between the one or more inserts and walls of the one or more plenums to split the one or more plenums into two or more zones, wherein each of the two or more zones includes at least one of the one or more flow paths.

10. The reconfigurable showerhead of claim 7, wherein each of the one or more flow paths spread recursively from an inlet to a plurality of outlets within the one or more plenums via a plurality of passages.

11. The reconfigurable showerhead of claim 10, wherein the plurality of passages each have a substantially equal fluid conductance.

12. The reconfigurable showerhead of claim 10, wherein the plurality of passages each have a substantially equal flow length.

13. The reconfigurable showerhead of claim 10, wherein the plurality of passages each have a substantially equal cross-sectional area along an equivalent position there along.

14. A substrate processing system, comprising:

a process chamber having a reconfigurable showerhead coupled to a gas supply for providing one or more process gases to the process chamber, the reconfigurable showerhead comprising a body having one or more plenums disposed therein and one or more inserts disposed within the one or more plenums, wherein the one or more inserts divide the reconfigurable showerhead into a plurality of zones.

15. The substrate processing system of claim 14, wherein the body comprises a first plate removably coupled to a second plate, and wherein at least one of the first plate and second plate comprise a plurality of recesses formed therein to form the one or more plenums.

16. The substrate processing system of claim 14, wherein the body further comprises a plurality of conduits coupling the one or more plenums to a substrate-facing surface of the reconfigurable showerhead.

17. The substrate processing system of claim 14, wherein the one or more inserts comprise one or more flow paths formed therein to allow a flow of gas therethrough.

18. The substrate processing system of claim 17, further comprising:

one or more seals disposed between the one or more inserts and walls of the one or more plenums to split the one or more plenums into two or more zones, wherein each of the two or more zones includes at least one of the one or more flow paths.

19. The substrate processing system of claim 17, wherein each of the one or more flow paths spread recursively from an inlet to a plurality of outlets within the one or more plenums via a plurality of passages.

20. A method of configuring a reconfigurable showerhead, comprising:

providing a body having one or more plenums disposed therein, a plurality of passageways configured to allow a flow of gas from a gas supply to the one or more plenums, and a plurality of conduits coupling the one or more plenums to a substrate-facing surface of the reconfigurable showerhead; and

inserting one or more inserts within the one or more plenums to divide the reconfigurable showerhead into a plurality of zones.