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RECONFIGURABLE MULTI-ZONE GAS DELIVERY HARDWARE FOR SUBSTRATE PROCESSING SHOWERHEADS

  • US 20110162800A1
  • Filed: 10/06/2010
  • Published: 07/07/2011
  • Est. Priority Date: 12/04/2009
  • Status: Active Grant
First Claim
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1. A reconfigurable showerhead, comprising:

  • a body having one or more plenums disposed therein; and

    one or more inserts configured to be disposed within the one or more plenums, wherein the one or more inserts divide the reconfigurable showerhead into a plurality of zones.

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