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CHAMBER WITH UNIFORM FLOW AND PLASMA DISTRIBUTION

  • US 20110162803A1
  • Filed: 09/17/2010
  • Published: 07/07/2011
  • Est. Priority Date: 11/11/2009
  • Status: Active Grant
First Claim
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1. A recursive liner system, comprising:

  • an outer liner having an outer portion configured to line the walls of a process chamber, a bottom portion extending inward from the outer portion, and a lip extending up from the bottom portion to define a well; and

    an inner liner having a lower portion configured to be at least partially disposed in the well to define, together with the outer liner, a recursive flow path therebetween.

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