METHOD FOR MANUFACTURING FLEXIBLE DISPLAY DEVICE AND FLEXIBLE DISPLAY DEVICE

• US 20110163067A1
• Filed: 03/11/2011
• Published: 07/07/2011
• Est. Priority Date: 11/27/2006
• Status: Active Grant

• Current Assignee: Eui Yeol Oh
• Original Assignee: Eui Yeol Oh
• Inventors: OH, Eui Yeol
• Granted Patent: US 8,257,129 B2
• Time in Patent Office: Days
• US Class Current: 216/36
• CPC Class Codes: B29D 11/0073 Optical laminates
• CPC Class Codes: G02F 1/133305 Flexible substrates, e.g. plastics, organic film
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/1218 with a particular composition or structure of the substrate
• CPC Class Codes: H01L 27/1266 the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
• CPC Class Codes: H10K 77/111 Flexible substrates
• CPC Class Codes: Y02E 10/549 Organic PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A flexible display device and a method for manufacturing a flexible display are provided. The flexible display device includes a flexible substrate, a display element layer formed on the flexible substrate; an insulating protective layer covering the display element layer; and a rigid substrate. The rigid substrate has an etching selectivity at least 20 times greater than that of the insulating protective layer.

Claims

1. A manufacturing method for flexible display device, comprising the steps of:

forming an insulating protection layer on a first substrate;

forming a display element layer on the insulating protection layer;

attaching a flexible substrate on the display element layer; and

etching the first substrate to remove the first substrate using an etchant having a selective etching ratio of the insulating protection layer to the first substrate of less than 1/20.

2. The manufacturing method of a flexible display device according to the claim 1, wherein the insulating protection layer has a thickness of 1 μ

m or less.

3. The manufacturing method of a flexible display device according to the claim 1, wherein the step of forming the insulating protection includes depositing any one of a silicon layer, a silicon nitride layer, a silicon oxide layer, a metal oxide layer and an organic layer on the first substrate.

4. The manufacturing method of a flexible display device according to the claim 1, wherein the metal oxide layer includes at least one of chrome oxide (Cr_xO_y), tantalum oxide (TaxO_y) and Aluminum oxide (Al_xO_y).

5. The manufacturing method of a flexible display device according to the claim 1, wherein the organic layer includes at least one of an acrylic organic material, BCB (benzo cyclobutene), PFBC (Perfluorocyclobutane), Teflon, Cytop and Polyimide.

6. The manufacturing method of a flexible display device according to the claim 1, wherein the insulating protection layer has two or more layers.

7. The manufacturing method of a flexible display device according to the claim 1, wherein the first substrate includes a glass substrate.

8. The manufacturing method of a flexible display device according to the claim 7, wherein the etching the first substrate includes wet-etching the first substrate with an etchant including buttered hydrogen fluoride (HF+NH₄F:

BHF).

9. The manufacturing method of a flexible display device according to the claim 8, further comprising the steps of:

before the step of etching the first substrate, forming a resin barrier on the first substrate on a side opposite to an insulating protection layer; and

after the step of etching the first substrate, removing the resin barrier.

10. The manufacturing method of a flexible display device according to the claim 7, wherein the etching the first substrate includes dry-etching the first substrate with an etchant including any one of CF₄+O₂ and SF₆+O₂.

11. The manufacturing method of a flexible display device according to the claim 1, wherein the first substrate includes a stainless substrate.

12. The manufacturing method of a flexible display device according to the claim 11, wherein the step of etching the first substrate includes wet-etching the first substrate with an etchant including iron chloride (FeCl₂).