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METHODS OF FORMING AN EMBEDDED CAVITY FOR SENSORS

  • US 20110165719A1
  • Filed: 03/13/2009
  • Published: 07/07/2011
  • Est. Priority Date: 03/13/2008
  • Status: Abandoned Application
First Claim
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1. A method of forming a sensor with an embedded cavity, comprising:

  • forming at least one cavity in a substrate such that the cavity includes at least one membrane wall having a plurality of holes in the membrane wall, the plurality of holes being formed in a two-dimensional array; and

    forming a piezoresistive system mechanically associated with the membrane wall.

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