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Semiconductor Device and Method For Manufacturing Semiconductor Device

  • US 20110165740A1
  • Filed: 03/17/2011
  • Published: 07/07/2011
  • Est. Priority Date: 12/18/2007
  • Status: Active Grant
First Claim
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1. A method for manufacturing a semiconductor device, comprising:

  • forming a first wiring over a substrate;

    forming an insulating film containing yttria-stabilized zirconia over the first wiring;

    forming a semiconductor film on the insulating film containing yttria-stabilized zirconia;

    forming an island-like semiconductor film by selective etching of the semiconductor film; and

    forming a second wiring over the island-like semiconductor film.

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