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PIEZOELECTRIC SENSOR FOR MEASURING PRESSURE FLUCTUATIONS

  • US 20110166459A1
  • Filed: 07/17/2009
  • Published: 07/07/2011
  • Est. Priority Date: 05/20/2008
  • Status: Active Grant
First Claim
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1. A piezo electric sensor for improved measurement of mechanical parameters like force, pressure and measurement values derived there from, in particular a piezo electric sensor with improved measurement signal sensitivity and -temperature stability for measuring pressures that vary with respect to space and time and for determining a position and propagation velocity of a pressure fluctuation and of pressure waves, the piezo electric sensor comprising:

  • at least two parallel strips made from a piezo electric material;

    at least one sensor base element;

    at least one cavity between the piezo electric material and the sensor base element; and

    at least one piece of amplifier electronics,wherein the parallel strips are made from a piezo electric material with a protective foil and a flexible circuit board configured as a measurement membrane laminate are glued onto the sensor base element, so that they are elastically preloaded in one dimension in a direction of a piezo-dipole orientation and a free cavity is provided between the piezo electric sensor material mounted under tension in the measurement portion and the sensor base element through a recess/milled recess.

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