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SUPPORT STRUCTURE, LOAD LOCK APPARATUS, PROCESSING APPARATUS AND TRANSFER MECHANISM

  • US 20110168330A1
  • Filed: 01/14/2011
  • Published: 07/14/2011
  • Est. Priority Date: 01/14/2010
  • Status: Abandoned Application
First Claim
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1. A support structure for supporting a processing target object, comprising:

  • a support main body that supports a weight of the processing target object;

    recess-shaped supporting body accommodating portions formed on a top surface of the support main body; and

    supporting bodies accommodated in the respective supporting body accommodating portions to be protruded above the top surface of the support main body, the supporting bodies being rollable in the respective supporting body accommodating portions while supporting the processing target object of which bottom surface is in contact with upper peak portions of the supporting bodies.

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