SUPPORT STRUCTURE, LOAD LOCK APPARATUS, PROCESSING APPARATUS AND TRANSFER MECHANISM

• US 20110168330A1
• Filed: 01/14/2011
• Published: 07/14/2011
• Est. Priority Date: 01/14/2010
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: HORIUCHI, Takashi, FUJIHARA, Kaoru, SAKAUE, Hiromitsu
• Application Number:
  US13/006,787
• Publication Number:
  US 20110168330A1
• Time in Patent Office: Days
• US Class Current: 156/345.31
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/6875 characterised by a plurality of individual support members, e.g. support posts or protrusions

Abstract

A support structure for supporting a processing target object includes a support main body that supports a weight of the processing target object and recess-shaped supporting body accommodating portions formed on a top surface of the support main body. The support structure further includes supporting bodies accommodated in the respective supporting body accommodating portions to be protruded above the top surface of the support main body. The supporting bodies are rollable in the respective supporting body accommodating portions while supporting the processing target object of which bottom surface is in contact with upper peak portions of the supporting bodies.

Claims

1. A support structure for supporting a processing target object, comprising:

a support main body that supports a weight of the processing target object;

recess-shaped supporting body accommodating portions formed on a top surface of the support main body; and

supporting bodies accommodated in the respective supporting body accommodating portions to be protruded above the top surface of the support main body, the supporting bodies being rollable in the respective supporting body accommodating portions while supporting the processing target object of which bottom surface is in contact with upper peak portions of the supporting bodies.

2. The support structure of claim 1, wherein each of the supporting bodies is formed in a sphere shape.

3. The support structure of claim 2, wherein a bottom surface of each of the supporting body accommodating portions is formed in a curved surface shape to allow the corresponding supporting body therein to return to an original position thereof when the processing target object is separated from the supporting body.

4. The supporting structure of claim 3, wherein the curved surface shape is a round shape in section, a conical shape or an elliptical arc shape in section.

5. The support structure of claim 3, wherein the curved surface shape is formed such that a central portion thereof is lowest.

6. The support structure of claim 5, wherein a particle deposit surface is horizontally formed around the bottom surface of each of the supporting body accommodating portions to make particles entering the supporting body accommodating portion be accumulated therein.

7. The support structure of claim 1, wherein a bottom surface of each of the supporting body accommodating portions is inclined with respect to a thermal expansion/contraction direction of the processing target object to allow the corresponding supporting body therein to return to an original position thereof when the processing target object is separated from the supporting body.

8. The support structure of claim 1, wherein each of the supporting bodies is formed in a cylinder shape.

9. The support structure of claim 8, wherein a bottom surface of each of the supporting body accommodating portions is inclined with respect to a thermal expansion/contraction direction of the processing target object to allow the corresponding supporting body therein to return to an original position thereof when the processing target object is separated from the supporting body.

13. The support structure of claim 1, wherein a jump-out preventing cover member is provided above each of the supporting body accommodating portions to prevent the corresponding supporting body from moving out of the supporting body accommodating portion.

16. The support structure of claim 1, wherein the support main body includes:

an elevating plate configured to be moved up and down by an actuator; and

elevating pins provided on a top surface of the elevating plate,

wherein each of the supporting body accommodating portions is formed at an upper end of each of the elevating pins.

17. The support structure of claim 1, wherein the support main body is rotatable and is configured to be capable of mounting thereon a multiple number of processing target objects at the same time.

18. A load lock apparatus connected between a vacuum chamber and an atmospheric chamber via gate valves and capable of selectively creating therein a vacuum atmosphere and an atmospheric atmosphere, the apparatus comprising:

a load lock chamber capable of being evacuated to a vacuum level and returned back into an atmospheric pressure;

the support structure of claim 1 provided in the load lock chamber;

a heat source for heating and/or cooling the processing target object;

a lifter mechanism that places the processing target object on the support main body and moves the processing target object away from the support main body; and

a gas exhaust unit that evacuates an internal atmosphere of the load lock chamber to vacuum.

19. A load lock apparatus connected between a vacuum chamber and an atmospheric chamber via gate valves and capable of selectively creating therein a vacuum atmosphere and an atmospheric atmosphere, the apparatus comprising:

a load lock chamber;

the supporting structure of claim 1 provided in a plural number;

a supporting unit having the supporting structures provided in the load lock chamber to support a multiple number of processing target objects in multiple levels;

a gas introduction unit having gas injection openings provided to correspond to the support structures to introduce an atmospheric pressure restoring gas as a cooling gas; and

a gas exhaust unit that evacuates an internal atmosphere of the load lock chamber to a vacuum level.

20. The load lock apparatus of claim 19, wherein the supporting unit includes uprightly standing supporting posts, and the support structures are fixed to the supporting posts at a preset pitch.

21. The load lock apparatus of claim 19, wherein the gas introduction unit has a gas inlet passage formed in the supporting unit.

22. The load lock apparatus of claim 19, wherein the supporting unit is installed on an elevating plate that is movable up and down.

23. A processing apparatus for performing a preset process on a processing target object, comprising:

a processing chamber that accommodates the processing target object therein;

the support structure of claim 1 provided within the processing chamber;

a heating unit that heats the processing target object;

a lifter mechanism that places the processing target object on the support main body and moves the processing target object away from the support main body;

a gas supply unit that supplies a processing gas into the processing chamber; and

a gas exhaust unit that evacuates an internal atmosphere of the processing chamber to a vacuum level.

24. The load lock apparatus of claim 18, wherein the lifter mechanism is made up of the supporting structure of claim 16.

25. The load lock apparatus of claim 23, wherein the lifter mechanism is made up of the supporting structure of claim 16.

26. A transfer mechanism for transferring a processing target object, comprising:

an arm member configured to be capable of making an extending/retracting motion and a rotating motion; and

the support structure of claim 1 provided on a leading end of the arm member.

27. The transfer mechanism of claim 26, wherein the arm member includes a holding component that holds a circumferential periphery of the processing target object, and the holding component is moved to hold the processing target object.

10. A support structure for supporting a processing target object, comprising:

a support main body that supports a weight of the processing target object;

recess-shaped supporting body accommodating portions formed on a top surface of the support main body; and

supporting bodies accommodated in the respective supporting body accommodating portions to be protruded above the top surface of the support main body, the supporting bodies being rockable in the supporting body accommodating portions while supporting the processing target object of which bottom surface is in contact with upper peak portions of the supporting bodies.

11. The support structure of claim 10, wherein a bottom surface of each of the supporting body accommodating portions is formed as a plane surface and has a shape to allow the corresponding supporting body to return to an original position thereof by its own gravity when the processing target object is separated from the supporting body.

12. The support structure of claim 11, wherein the shape of the bottom surface of each of the supporting body accommodating portions is an elliptical arc shape in section.

14. A support structure for supporting a processing target object, comprising:

a support main body that supports a weight of the processing target object;

recess-shaped supporting body accommodating portions formed on a top surface of the support main body; and

supporting bodies accommodated in the respective supporting body accommodating portions to be protruded above the top surface of the support main body, the supporting bodies being rotatably supported in the supporting body accommodating portions while supporting the processing target object of which bottom surface is in contact with upper peak portions of the supporting bodies.

15. The support structure of claim 14, wherein each of the supporting bodies is supported in a direction perpendicular to a thermal expansion/contraction direction of the processing target object.