PROCESS CONTROL USING SIGNAL REPRESENTATIVE OF A THROTTLE VALVE POSITION

• US 20110168671A1
• Filed: 01/08/2010
• Published: 07/14/2011
• Est. Priority Date: 01/08/2010
• Status: Abandoned Application

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Yamartino, John M., Lisi, Anthony D.
• Application Number:
  US12/684,162
• Publication Number:
  US 20110168671A1
• Time in Patent Office: Days
• US Class Current: 216/59
• CPC Class Codes: H01J 37/32963 End-point detection
• CPC Class Codes: H01L 21/31116 by dry-etching

Abstract

In accordance with an embodiment of the invention, a step in a fabrication process can be conducted so as to determine when the process has reached an end point. End point detection can be performed by detecting when a operating process condition changes. For example, in one embodiment, a step in a fabrication process (e.g., an etching step) can be conducted in a chamber by varying a position of a throttle valve connected to the chamber so as to maintain a desired pressure within the chamber. In such method, it can be determined when the etching step has reached an end point by detecting when a signal representative of the throttle valve position changes in a particular way which matches an expected signature. In another embodiment, a step in a fabrication process can be conducted in a chamber by maintaining a desired flow within the chamber, such as by controlling a throttle valve, and allowing the pressure within the chamber to vary. In such method, it can be determined when the step has reached an end point by detecting when a signal representative of the pressure changes. In a particular embodiment in which end point detection is based on change in pressure, the throttle valve can be maintained at a particular position when conducting the step in the fabrication process.

Claims

1. A method, comprising:

a) conducting at least a step in a fabrication process in a processing chamber by varying a position of a throttle valve with time to thereby maintain a desired pressure within the chamber;

b) generating a signal representative of the position of the throttle valve; and

c) determining when the step in the fabrication process has reached an end point by detecting a change in the signal.

2. A method as claimed in claim 1, wherein step (c) includes determining from the signal when a change in the position of the throttle valve matches an expected signature.

3. A method as claimed in claim 2, wherein step (a) includes etching that removes at least a portion of a second layer overlying a first layer, the first and second layers having different compositions, and step (c) includes detecting when the etching exposes at least a portion of the first layer.

4. A method as claimed in claim 2, wherein step (a) includes conducting the step in the fabrication process with the position of the throttle valve set to at least 35% open.

5. A method as claimed in claim 3, further comprising, prior to step (a), recording a first flow quantity between the interior and exterior of the chamber and a first pressure within the chamber while etching the layer with the throttle valve fixed in a first position, wherein step (a) includes conducting the etching process using the first flow quantity and while maintaining the pressure within the chamber at the first pressure value, wherein step (c) includes detecting when a change in the position of the throttle valve matches an expected signature.

6. A method as claimed in claim 5, wherein step (b) includes recording the position of the throttle valve as a function relative to time, and step (c) includes determining when a shape of the function matches an expected signature.

7. A method as claimed in claim 5, wherein step (b) includes recording the position of the throttle valve as a function relative to time, and step (c) includes determining when a slope of the function matches an expected signature.

8. A method as claimed in claim 5, wherein step (b) includes recording the position of the throttle valve as a function relative to time, and step (c) includes determining when an inflection of the function matches an expected signature.

9. A computer-readable recording medium having instructions recorded thereon, the instructions being executable by a processor to perform a method as claimed in claim 1.

10. An information processing system comprising:

a processor; and

instructions executable by the processor to perform a method as claimed in claim 1.

11. A method, comprising:

a) conducting a step in a fabrication process in a chamber at a pressure subject to variation by setting a throttle valve to a fixed position;

b) generating a signal representative of the pressure within the chamber; and

c) determining when the step in the fabrication process has reached an end point by detecting a change in the signal.

12. A method as claimed in claim 11, wherein step (c) includes determining from the signal when a change in the pressure matches an expected signature.

13. A method as claimed in claim 12, wherein step (a) includes etching that removes at least a portion of a second layer overlying a first layer, the first and second layers having different compositions, and the determining of an end point in step (c) coincides with a time when the etching exposes at least a portion of the first layer.

14. A method as claimed in claim 12, wherein step (a) includes conducting the step in the fabrication process with the position of the throttle valve set to at most 20% open.

15. A method as claimed in claim 13, further comprising, prior to step (a), recording a first flow quantity between the interior and exterior of the chamber and a first pressure within the chamber while etching the layer while the throttle valve is fixed in a first position, wherein step (a) includes conducting the etching process using the first flow quantity, and step (c) includes detecting when a change in the pressure from the first pressure matches an expected signature.

16. A method as claimed in claim 13, further comprising, prior to step (a), recording a first value of the pressure while maintaining the position of the throttle valve fixed in a first position and etching the layer, wherein step (a) includes conducting the etching step with the throttle valve fixed in the first position, and step (c) includes detecting when a change in the pressure from the first value matches an expected signature.

17. A method as claimed in claim 16, wherein step (b) includes recording the pressure as a function relative to time, and step (c) includes determining when a shape of the function matches an expected signature.

18. A method as claimed in claim 16, wherein step (b) includes recording the pressure as a function relative to time, and step (c) includes determining when a slope of the function matches an expected signature.

19. A computer-readable recording medium having instructions recorded thereon, the instructions being executable by a processor to perform a method as claimed in claim 11.

20. An information processing system comprising:

a processor; and

instructions executable by the processor to perform a method as claimed in claim 11.