CAPACITIVE SENSOR DEVICE AND A METHOD OF SENSING ACCELERATIONS
First Claim
1. A capacitive sensor device, comprising:
- a substrate;
a first electrode coupled to the substrate;
a second electrode coupled to the substrate; and
a movable element;
wherein the movable element is capacitively coupled to the first electrode, the moveable element and the first electrode effecting a first capacitor;
wherein the movable element is capacitively coupled to the second electrode, the moveable element and the second electrode effecting a second capacitor;
wherein the movable element is movable between the first electrode and the second electrode in such a manner, that an electrical impedance between the first electrode and the second electrode is changeable due to a change of a position of the movable element;
wherein the movable element is decoupled from the substrate.
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Accused Products
Abstract
The invention relates to a capacitive sensor device 100. The capacitive sensor device (100) comprises a substrate (401), a first electrode (101) coupled to the substrate (401, a second electrode (102) coupled to the substrate (401) and a movable element (103). The movable element (103) is capacitively coupled to the first electrode (101), the moveable element (103) and the first electrode (101) representing a first capacitor (104). The movable element (103) is capacitively coupled to the second electrode (102), the moveable element (103) and the second electrode (102) representing a second capacitor (105). The movable element (103) is movable between the first electrode (101) and the second electrode (102) in such a manner, that an electrical impedance between the first electrode (101) and the second electrode (102) is changeable due to a change of a position of the movable element (103). The movable element (103) is decoupled from the substrate (401), in particular to a signal line.
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Citations
11 Claims
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1. A capacitive sensor device, comprising:
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a substrate; a first electrode coupled to the substrate; a second electrode coupled to the substrate; and a movable element; wherein the movable element is capacitively coupled to the first electrode, the moveable element and the first electrode effecting a first capacitor; wherein the movable element is capacitively coupled to the second electrode, the moveable element and the second electrode effecting a second capacitor; wherein the movable element is movable between the first electrode and the second electrode in such a manner, that an electrical impedance between the first electrode and the second electrode is changeable due to a change of a position of the movable element; wherein the movable element is decoupled from the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. Method of producing a capacitive sensor device, the method comprising:
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providing a substrate; forming a buried oxide layer on the substrate; forming a top silicon layer on the buried oxide layer; etching holes and trenches in the top silicon layer, wherein a pattern of the holes and trenches are defined by a mask; removing the buried oxide layer located below the top silicon layer according to the pattern.
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10. A method of sensing accelerations, the method comprising:
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capacitively coupling a movable element to a first electrode, the moveable element and the first electrode effecting a first capacitor; capacitively coupling the movable element to a second electrode, the moveable element and the second electrode effecting a second capacitor; moving the movable element between the first electrode and the second electrode in such a manner, that an electrical impedance between the first electrode and the second electrode is changeable due to a change of a position of the movable element; and decoupling the movable element from a substrate of the sensor device. - View Dependent Claims (11)
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Specification