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MEMS DIAPHRAGM

  • US 20110169110A1
  • Filed: 03/25/2011
  • Published: 07/14/2011
  • Est. Priority Date: 10/09/2008
  • Status: Active Grant
First Claim
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1. The MEMS diaphragm, comprising:

  • a first conductive layer, disposed on a substrate and having a plurality of openings, wherein the openings having a first dimension and the openings having a second dimension are arranged alternately, and the first dimension is not equal to the second dimension;

    a second conductive layer, disposed between the first conductive layer and the substrate; and

    a first dielectric layer, partially disposed between the first conductive layer and the second conductive layer, so that a portion of the first conductive layer is suspended.

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