APPARATUS FOR MEASURING MINORITY CARRIER LIFETIME AND METHOD FOR USING THE SAME

• US 20110169520A1
• Filed: 01/14/2010
• Published: 07/14/2011
• Est. Priority Date: 01/14/2010
• Status: Abandoned Application

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: TIGWELL, David C., MILLER, G. Lorimer, FOSTER, Joseph W.
• Application Number:
  US12/687,855
• Publication Number:
  US 20110169520A1
• Time in Patent Office: Days
• US Class Current: 324/762.01
• CPC Class Codes: G01R 31/2648 Characterising semiconductor materials testing of materials or semi-finished products G01R31/2831; testing during manufacture H01L22/00
• CPC Class Codes: G01R 31/265 Contactless testing of circuits, also in wafer-form G01R31/302
• CPC Class Codes: G01R 31/318511 Wafer Test
• CPC Class Codes: H01L 22/14 for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

An apparatus for measuring minority carrier lifetime is provided. The apparatus includes a resonant circuit having an inductor and a capacitor and configured to resonate at a measurement frequency. The apparatus also includes a ferromagnetic core having a first portion and a second portion. The first portion defines a gap and can be configured to direct therealong a magnetic field established by the inductor, such that lateral spreading of the magnetic field outside of the first portion is inhibited, and to direct the magnetic field generally uniformly across the gap. The second portion can be configured to direct the magnetic field therealong and, in conjunction with the first portion, into a closed loop. A radiation source can be configured to irradiate an area proximal to the gap defined by the first portion of the ferromagnetic core.

Claims

19. An apparatus comprising:

a ferromagnetic core including

a first portion that defines a gap and is configured to direct therealong a magnetic field established by an inductor coiled around said first portion, such that lateral spreading of the magnetic field outside of said first portion is inhibited, and to direct the magnetic field generally uniformly across the gap; and

a second portion configured to direct the magnetic field therealong and, in conjunction with said first portion, into a closed loop; and

a radiation source integrated into said ferromagnetic core.

20. The apparatus of claim 19, wherein said radiation source is configured to irradiate a radially symmetric area around the gap defined by said first portion of said ferromagnetic core.

21. The apparatus of claim 19, wherein said first portion defines a longitudinal axis, and said ferromagnetic core is generally radially symmetric about the longitudinal axis.

22. The apparatus of claim 19, wherein said radiation source includes at least two light emitting diodes configured to emit radiation of respectively different wavelengths.

23. The apparatus of claim 19, wherein said apparatus is configured to receive a sample of semiconductor material in the gap defined by said first portion of said ferromagnetic core such that said radiation source can irradiate the sample.

24. The apparatus of claim 19, wherein said ferromagnetic core includes opposing first and second parts, said first part forming at least part of said first and second portions and said second part forming at least part of said first and second portions.

25. The apparatus of claim 24, wherein said first and second parts are generally symmetrical across a plane directed along the gap defined by said first portion of said ferromagnetic core.

26. The apparatus of claim 24, wherein said first and second parts respectively include elongated bases, a central post extending from each of said elongated bases, and a pair of side posts extending from each of said elongated bases on opposing sides of, and generally parallel to, said central post, such that each of said first and second parts generally forms an “

E”

shape, said first portion including said central posts and said second portion including said side posts.

27. The apparatus of claim 24, wherein said first and second parts respectively include generally planar bases, said first portion extends generally perpendicularly from said bases, and said second portion forms a generally annular flange extending generally perpendicularly from said bases and circumferentially around said first portion.

28. The apparatus of claim 27, wherein said second portion defines a gap that is aligned with the gap defined by said first portion.

29. The apparatus of claim 27, wherein said radiation source includes a light emitting diode that extends through one of said bases and is disposed between said first portion and said flange formed by said second portion.

30. The apparatus of claim 27, wherein said radiation source includes at least two light emitting diodes that extend through respective ones of said bases and are respectively disposed between said first portion and said flange formed by said second portion.

31. The apparatus of claim 27, wherein said radiation source includes a plurality of light emitting diodes disposed circumferentially around said first portion and extending through one of said bases between said first portion and said flange formed by said second portion.

32. The apparatus of claim 31, wherein said radiation source includes another plurality of light emitting diodes disposed circumferentially around said first portion and extending through another of said bases between said first portion and said flange formed by said second portion.

33. A method comprising:

providing an apparatus including

a resonant circuit including an inductor and a capacitor and configured to resonate at a measurement frequency associated with a measurement frequency voltage across the resonant circuit;

a ferromagnetic core including

a first portion that defines a gap and is configured to direct therealong a magnetic field established by the inductor, such that lateral spreading of the magnetic field outside of the first portion is inhibited, and to direct the magnetic field generally uniformly across the gap; and

a second portion configured to direct the magnetic field therealong and, in conjunction with the first portion, into a closed loop; and

a radiation source configured to irradiate an area proximal to the gap defined by the first portion of the ferromagnetic core;

electromagnetically coupling a sample into the resonant circuit, a first portion of the sample being disposed in the gap such that a magnetic field established by the inductor extends generally uniformly through the first portion of the sample;

adjusting a drive current of the resonant circuit to maintain constant the measurement frequency voltage; and

intermittently, at a switching frequency, irradiating the sample in an area proximal to the first portion with radiation configured to cause photoconduction in the sample, the switching frequency being on the order of or lower than the inverse of minority carrier lifetime for the sample.

34. The method of claim 33, further comprising determining a minority carrier lifetime for the sample.

35. The method of claim 34, wherein said determining a minority carrier lifetime for the sample includes measuring the drive current both while irradiating the sample and when the sample is not being irradiated.

36. The method of claim 35, wherein said measuring the drive current further includes sampling the drive current at a sample rate that is higher than the inverse of minority carrier lifetime for the sample and at times immediately subsequent to commencing and halting irradiation of the sample, said method further comprising determining a functional approximation for temporal drive current data measured after halting irradiation of the sample and within a time equal to the inverse of minority carrier lifetime for the sample.

37. The method of claim 35, wherein said measuring the drive current includes measuring the quasi-steady state drive current after commencing and halting irradiation of the sample to find a difference therebetween, further comprising scaling the difference and providing the scaled difference as an output.

38. The method of claim 33, wherein said intermittently irradiating the sample includes intermittently irradiating the sample with radiation of a first characteristic wavelength and subsequently intermittently irradiating the sample with radiation of a second characteristic wavelength that is different from the first characteristic wavelength.

39. The method of claim 33, further comprising repeatedly repositioning the sample such that different portions of the sample are disposed in the gap defined by the first portion of the ferromagnetic core, and wherein said measuring the drive current includes repeatedly measuring the drive current in response to each repeated repositioning of the sample.

40. The method of claim 33, wherein said providing an apparatus includes providing an apparatus including a ferromagnetic core having opposing first and second parts, said first part forming at least part of said first and second portions and said second part forming at least part of said first and second portions, wherein said first and second parts respectively include generally planar bases, said first portion extends generally perpendicularly from said bases, and said second portion forms a generally annular flange extending generally perpendicularly from said bases and circumferentially around said first portion.

41. The method of claim 40, wherein said providing an apparatus includes providing an apparatus including a radiation source having a plurality of light emitting diodes disposed circumferentially around said first portion and extending through one of said bases between said first portion and said flange formed by said second portion.

42. The method of claim 33, wherein said providing an apparatus includes providing an apparatus including a ferromagnetic core having opposing first and second parts that respectively include elongated bases, a central post extending from each of said elongated bases, and a pair of side posts extending from each of said elongated bases on opposing sides of, and generally parallel to, said central post, such that each of said first and second parts generally forms an “

E”

shape, said first portion including said central posts and said second portion including said side posts.

43-1. The apparatus of claim 43, wherein said tubular portion is transparent to radiation emitted from said radiation source.