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Projection exposure apparatus, cleaning and maintenance methods of a projection exposure apparatus, and device manufacturing method

  • US 20110170080A1
  • Filed: 03/21/2011
  • Published: 07/14/2011
  • Est. Priority Date: 09/26/2003
  • Status: Active Grant
First Claim
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1. A liquid immersion type projection exposure apparatus in which a gap between an optical element and an object of exposure is filled with a liquid and the object is exposed, the liquid immersion type projection exposure apparatus comprising:

  • a liquid supply system which supplies the liquid to the gap; and

    cleaning means for removing adhering substances within a flow path of the liquid, the flow path being separate from the gap and supplying the liquid to the gap.

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