MOVING STRUCTURE AND MICRO-MIRROR DEVICE USING THE SAME
First Claim
Patent Images
1. A moving structure comprising:
- a moving plate;
beam shaped hinge units which pivot the moving plate swingably; and
a frame unit which supports the hinge units, whereineach of the hinge units has a ladder shape having twin supporting rods and crosspieces bridged between the twin supporting rods, andthe twin supporting rods are not disposed in parallel with each other in planar view.
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Abstract
In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.
18 Citations
12 Claims
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1. A moving structure comprising:
- a moving plate;
beam shaped hinge units which pivot the moving plate swingably; and
a frame unit which supports the hinge units, whereineach of the hinge units has a ladder shape having twin supporting rods and crosspieces bridged between the twin supporting rods, and the twin supporting rods are not disposed in parallel with each other in planar view. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
- a moving plate;
Specification