ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION
First Claim
Patent Images
1. An electromechanical device comprising:
- a movable element includingan electrically conductive deformable layer; and
a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface; and
an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving towards the actuation electrode.
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Abstract
In certain embodiments, a microelectromechanical (MEMS) device includes a movable element over the substrate and an actuation electrode. The movable element includes an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The actuation electrode is under at least a portion of the deformable layer and is disposed laterally from the reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving towards the actuation electrode.
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Citations
27 Claims
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1. An electromechanical device comprising:
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a movable element including an electrically conductive deformable layer; and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface; and an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving towards the actuation electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An electromechanical device comprising:
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a movable element including electrically conductive means for deforming; and means for reflecting, the reflecting means mechanically coupled to the deforming means, the reflecting means including a reflective surface; and means for actuating the movable element, the actuating means under at least a portion of the deforming means and disposed laterally from the reflective surface, wherein the movable element is responsive to a voltage difference applied between the actuating means and the deforming means by moving towards the actuating means. - View Dependent Claims (24)
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25. A method of manufacturing an electromechanical device, the method comprising:
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forming a sacrificial layer over an actuation electrode; forming an electrically conductive deformable layer over the sacrificial layer, the actuation electrode under at least a portion of the deformable layer; forming a reflective element over the sacrificial layer and mechanically coupled to the deformable layer, the reflective element including a reflective surface disposed laterally from the actuation electrode; and removing the sacrificial layer, wherein after removing the sacrificial layer a movable element includes the deformable layer and the reflective element, the movable element responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving towards the actuation electrode. - View Dependent Claims (26)
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27. A method of modulating light, the method comprising:
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providing a device including a movable element and an actuation electrode, the movable element including an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface; and applying a voltage difference between the actuation electrode and the deformable layer, thereby causing the movable element to move towards the actuation electrode.
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Specification