ELECTROMAGNETIC BAND GAP STRUCTURE, ELEMENT, SUBSTRATE, MODULE, AND SEMICONDUCTOR DEVICE INCLUDING ELECTROMAGNETIC BAND GAP STRUCTURE, AND PRODUCTION METHODS THEREOF
First Claim
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1. An electromagnetic band gap structure comprising:
- an insulating substrate;
a plurality of conductor pieces regularly arranged on the insulating substrate;
a dielectric layer formed so as to fill a space between adjacent ones of the conductor pieces;
an interlayer insulating layer formed on the dielectric layer; and
a conductor plane that is formed on the interlayer insulating layer and is connected to each of the conductor pieces with a conductor penetrating through the interlayer insulating layer.
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Abstract
To provide a small-sized and thin electromagnetic band gap structure which can be surface-mounted or built in a substrate. An electromagnetic band gap structure according to an aspect of the present invention includes: an insulating substrate; a plurality of conductor pieces regularly arranged on the insulating substrate; a dielectric layer formed so as to fill a space between adjacent ones of the conductor pieces; an interlayer insulating layer formed on the dielectric layer; and a conductor plane which is formed on the interlayer insulating layer and is connected to each of the conductor pieces with a conductor penetrating through the interlayer insulating layer.
36 Citations
29 Claims
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1. An electromagnetic band gap structure comprising:
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an insulating substrate; a plurality of conductor pieces regularly arranged on the insulating substrate; a dielectric layer formed so as to fill a space between adjacent ones of the conductor pieces; an interlayer insulating layer formed on the dielectric layer; and a conductor plane that is formed on the interlayer insulating layer and is connected to each of the conductor pieces with a conductor penetrating through the interlayer insulating layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A production method of an electromagnetic band gap structure, comprising:
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forming a plurality of conductor pieces regularly on an insulating substrate; forming a dielectric layer so as to fill a space between adjacent ones of the conductor pieces; forming an interlayer insulating layer on the dielectric layer; and forming a conductor plane on the interlayer insulating layer, the conductor plane being connected to each of the conductor pieces. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification