FRAMED TRANSDUCER DEVICE
First Claim
1. A microelectromechanical systems (MEMS) device comprising:
- a substrate;
a proof mass suspended above a surface of said substrate, said proof mass including a first finger extending outwardly from an outer periphery of said proof mass;
a frame structure laterally spaced apart from said outer periphery of said proof mass, said frame structure including second fingers extending inwardly from an inner periphery of said frame structure, said first finger being disposed between a pair of said second fingers;
at least one compliant member coupled to each of said proof mass and said frame structure to retain said proof mass suspended above said surface of said substrate, said at least one compliant member enabling said proof mass to move substantially parallel to said surface of said substrate in a sense direction in response to a force in said sense direction so that said first finger moves relative to said second fingers; and
at least one anchor configured retain said frame structure suspended above said surface of said substrate.
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0 Petitions
Accused Products
Abstract
A MEMS device (20) includes a substrate (22), a proof mass (28), and a frame structure (30) laterally spaced apart from the proof mass (28). Compliant members (36) are coupled to the proof mass (28) and the frame structure (30) to retain the proof mass (28) suspended above the surface (26) of the substrate (22) without directly coupling the proof mass (28) to the substrate (22). Anchors (32) suspend the frame structure (30) above the surface (26) of the substrate (22) without directly coupling the structure (30) to the substrate (22), and retain the structure (30) immovable relative to the substrate (22) in a sense direction (42). The compliant members (36) enable movement of the proof mass (28) in the sense direction (42). Movable fingers (38) extending from the proof mass (28) are disposed between fixed fingers (46) extending from the frame structure (30) to form a differential capacitive structure.
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Citations
20 Claims
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1. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a proof mass suspended above a surface of said substrate, said proof mass including a first finger extending outwardly from an outer periphery of said proof mass; a frame structure laterally spaced apart from said outer periphery of said proof mass, said frame structure including second fingers extending inwardly from an inner periphery of said frame structure, said first finger being disposed between a pair of said second fingers; at least one compliant member coupled to each of said proof mass and said frame structure to retain said proof mass suspended above said surface of said substrate, said at least one compliant member enabling said proof mass to move substantially parallel to said surface of said substrate in a sense direction in response to a force in said sense direction so that said first finger moves relative to said second fingers; and at least one anchor configured retain said frame structure suspended above said surface of said substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a proof mass suspended above a surface of said substrate, said proof mass including a first finger extending outwardly from an outer periphery of said proof mass; a frame structure laterally spaced apart from said outer periphery of said proof mass, said frame structure including second fingers extending inwardly from an inner periphery of said frame structure, said first finger being disposed between a pair of said second fingers; at least one compliant member coupled to each of said proof mass and said frame structure to retain said proof mass suspended above said surface of said substrate without a direct coupling between said proof mass and said substrate, said at least one compliant member enabling said proof mass to move substantially parallel to said surface of said substrate in a sense direction in response to a force in said sense direction so that said first finger moves relative to said pair of said second fingers; and at least one anchor configured to retain said frame structure suspended above said surface of said substrate, said at least one anchor retaining said frame structure substantially immovable relative to said substrate in said sense direction. - View Dependent Claims (15, 16, 17, 18)
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19. A microelectromechanical systems (MEMS) device comprising:
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a substrate; a proof mass suspended above a surface of said substrate, said proof mass including a first finger extending outwardly from an outer periphery of said proof mass; a frame structure laterally spaced apart from said outer periphery of said proof mass, said frame structure including second fingers extending inwardly from an inner periphery of said frame structure, said first finger being disposed between a pair of said second fingers; at least one compliant member coupled to each of said proof mass and said frame structure to retain said proof mass suspended above said surface of said substrate, said at least one compliant member enabling said proof mass to move substantially parallel to said surface of said substrate in a sense direction in response to a force in said sense direction so that said first finger moves relative to said pair of said second fingers; and at least one anchor configured to retain said frame structure suspended above said surface of said substrate, said at least one anchor is positioned proximate an axis of symmetry of said MEMS device, and said at least one anchor retaining said frame structure substantially immovable relative to said substrate in said sense direction. - View Dependent Claims (20)
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Specification