METHOD AND APPARATUS FOR PROCESSING A MICROSAMPLE

• US 20110174974A1
• Filed: 01/14/2011
• Published: 07/21/2011
• Est. Priority Date: 11/02/2000
• Status: Active Grant

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: SHICHI, Hiroyasu, TOMIMATSU, Satoshi, TOKUDA, Mitsuo, MITSUI, Yasuhiro, UMEMURA, Kaoru, KASHIMA, Hideo, KOIKE, Hidemi, FUKUDA, Muneyuki
• Granted Patent: US 8,222,618 B2
• Time in Patent Office: Days
• US Class Current: 250/310
• CPC Class Codes: G01N 23/225 using electron or ion
• CPC Class Codes: H01J 2237/20 Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
• CPC Class Codes: H01J 2237/202 Movement
• CPC Class Codes: H01J 2237/31745 for preparing specimen to be viewed in microscopes or analyzed in microanalysers
• CPC Class Codes: H01J 37/256 using scanning beams
• CPC Class Codes: H01J 37/3056 for microworking, e. g. etching of gratings or trimming of electrical components
• CPC Class Codes: H04L 67/51 Discovery or management thereof, e.g. service location protocol [SLP] or web services
• CPC Class Codes: H04L 69/329 in the application layer [OSI layer 7]
• CPC Class Codes: H04L 9/40 Network security protocols

Abstract

An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus of the invention, there are included a focused ion beam optical system and an electron optical system in one vacuum container, and a minute sample containing a desired area of the sample is separated by forming processing with a charged particle beam, and there are included a manipulator for extracting the separated minute sample, and a manipulator controller for driving the manipulator independently of a wafer sample stage.

Claims

1. An apparatus for processing and observing a minute sample comprising:

a first sample stage on which a sample is placed, said first sample stage being movable in a longitudinal direction, in a horizontal direction and in a vertical direction, and rotatable and tiltable;

a second sample stage on which a minute sample extracted from the sample is fixed and which is adapted to change irradiation angles of an ion beam and an electron beam to the minute sample and a height of the minute sample;

a sample chamber in which the first and second sample stages are arranged;

a focused ion beam optical system for irradiating the ion beam to the sample placed on the first sample stage and the minute sample fixed on the second sample stage;

an electron beam optical system for irradiating the electron beam to the minute sample fixed on the second sample stage, said electron beam optical system being arranged such that an axis of electron beam intersects with an axis of ion beam of said focused ion beam optical system in said sample chamber, and

a detector for detecting a secondary particle,

wherein the ion beam is irradiating the electron beam to the minute sample fixed on the second sample stage to form a desired observation section to the minute sample extracted from the sample,

the irradiation angle of the electron beam to the observation section of the minute sample is changed by the second sample stage so as to be substantially perpendicular to the observation section of the minute sample

the minute sample is moved with respect to the electron beam optical system to be positioned at a position where an optical resolution of the minute sample by means of the electron beam optical system becomes high, and

the electron beam is applied substantially perpendicular to the observation section of the minute sample fixed on the second sample stage and the observation section of the minute sample is perpendicularly observed and an internal section of the sample is measured.

2. The apparatus of claim 1, wherein the sample is an electron device.

3. The apparatus of claim 1, wherein the sample is a micro-device.

4. The apparatus of claim 1, further comprising a manipulator for supporting the minute sample.

5. The apparatus of claim 1, further comprising a probe for supporting the minute sample.

6. The apparatus of claim 1, further comprising a second sample stage controller for controlling an angle of the second sample stage.

15. The apparatus of claim 1, wherein the second sample stage is configured such that a plurality of the minute sample can be fixed thereon.

16. The apparatus of claim 1, wherein the second sample stage comprises a rotatable column.

17. The apparatus of claim 1, wherein the minute sample is a pentahedron.

18. The apparatus of claim 1, wherein the minute sample is a tetrahedron.

19. The apparatus of claim 1, wherein an irradiation angle of the ion beam to the minute sample is changed by the second sample stage and then the ion beam is irradiated to the minute sample fixed on the second sample stage.

7. An apparatus for processing and observing a minute sample comprising:

a first stage on which a semiconductor device is placed, said first sample stage being movable in a longitudinal direction, in a horizontal direction and in a vertical direction, and rotatable and tiltable;

a second sample stage on which a minute sample is fixed;

a second sample stage controller for controlling an angle and a height of the second sample stage;

a sample chamber in which the first and second sample stages are arranged;

a focused ion beam optical system for irradiating the ion beam to the semiconductor device placed on the first sample stage and the minute sample fixed on the second sample stage;

an electron beam optical system for irradiating the electron beam to the minute sample fixed on the second sample stage, said electron beam optical system being arranged such that an axis of electron beam intersects with an axis of ion beam of said focused ion beam optical system in said sample chamber;

a detector for detecting a secondary particle, and

a probe for supporting the minute sample,

wherein the ion beam is irradiated from the focused ion beam optical system to the semiconductor device to extract the minute sample from the semiconductor device,

the minute sample is supported by the probe,

the minute sample supported by the probe is fixed on the second sample stage,

the ion beam is irradiated to the minute sample fixed on the second sample stage to form a desired observation section to the minute sample extracted from the semiconductor device,

an angle of the second sample stage is changed so that the observation section of the minute sample becomes substantially perpendicular to the electron beam,

the minute sample is moved with respect to the electron beam optical system to be positioned at a position where an optical resolution of the minute sample by means of the electron beam optical system becomes high,

the electron beam is applied substantially perpendicular to the observation section of the minute sample fixed on the second sample stage and the observation section of the minute sample is measured, and

the observation section of the minute sample is perpendicularly observed and a desired internal section of the semiconductor device is measured while the semiconductor device is placed in the sample chamber of which internal atmosphere is vacuum.

8. The apparatus of claim 7, wherein the semiconductor device is a semiconductor chip.

9. The apparatus of claim 7, wherein the semiconductor device is a semiconductor wafer.

10. The apparatus of claim 7, wherein the second sample stage is configured such that a plurality of the minute sample can be fixed thereon.

11. The apparatus of claim 7, wherein the second sample stage comprises a rotatable column.

12. The apparatus of claim 7, wherein the minute sample is a pentahedron.

13. The apparatus of claim 7, wherein the minute sample is a tetrahedron.

14. The apparatus of claim 7, wherein an irradiation angle of the ion beam to the minute sample is changed by the second sample stage and then the ion beam is irradiated to the minute sample fixed on the second sample stage.