VACUUM VALVE

• US 20110175011A1
• Filed: 09/21/2009
• Published: 07/21/2011
• Est. Priority Date: 09/29/2008
• Status: Active Grant

• Current Assignee: VAT Holding AG (VAT Group AG)
• Original Assignee: VAT Holding AG (VAT Group AG)
• Inventors: Ehrne, Florian, Blecha, Thomas
• Granted Patent: US 8,672,293 B2
• Time in Patent Office: Days
• US Class Current: 251/366
• CPC Class Codes: F16K 3/182 by means of toggle links
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A vacuum valve including a wall (1) having a valve opening (2) surrounded by a valve seat (4), at least one valve plate (5), which is disposed in a vacuum region of the vacuum valve and can be moved from an open position in a longitudinal direction (6) into an intermediate position, and from the intermediate position in a transverse direction (7) perpendicular to the longitudinal direction (6) into a closed position. At least one valve rod (12), which carries the valve plate (5), is led through the vacuum region of the vacuum valve and can be displaced relative to the wall (1) in the longitudinal direction (6) located parallel to the longitudinal axis (14) of the valve rod (12), and also in the transverse direction (7). Longitudinal and transverse drive devices (15, 15′, 16, 16′) are disposed outside of the vacuum region of the vacuum valve, and the drive devices can displace the valve rod (12) in the longitudinal direction (6) and in the transverse direction (7) in order to adjust the valve plate (5). A bearing unit (17, 17′) is provided, which is located outside of the vacuum region of the vacuum valve and rigidly connected to the wall (1) and by which a guide unit (20, 20′) that displaceably guides the valve rod (12) in the longitudinal direction (6) is guided displaceably in the transverse direction (7).

Claims

1. Vacuum valve comprising:

a wall (1) with a valve opening (2) that is surrounded by a valve seat (4), at least one valve plate (5) is arranged in a vacuum region of the vacuum valve and is adjustable from an open position in which the valve opening (2) is open in a longitudinal direction (6), into an intermediate position in which the valve plate covers the valve opening (2) but is lifted from the valve seat (4), and from the intermediate position the valve plate is adjustable in a transverse direction (7) at a right angle to the longitudinal direction (6) into a closed position in which the valve plate is pressed onto the valve seat (4) and closes the valve opening (2),

at least one valve rod (12) carries the valve plate (5) and is guided out from the vacuum region of the vacuum valve and is displaceable relative to the wall (1) in the longitudinal direction (6) lying parallel to the longitudinal axis (14) of the valve rod (12), and also can be displaced parallel and relative to the wall in the transverse direction (7),

a longitudinal drive device (15, 15′

) is arranged outside of the vacuum region of the vacuum valve by which the valve rod (12) can be displaced in the longitudinal direction (6) for adjusting the valve plate (5) between the open position and the intermediate position, and

a transverse drive device (16, 16′

) is arranged outside of the vacuum region of the vacuum valve by which the valve rod (12) can be displaced parallel and in the transverse direction (7) for adjusting the valve plate (5) between the intermediate position and the closed position,

a bearing unit (17, 17′

) lies outside of the vacuum region of the vacuum valve and is connected rigidly to the wall (1) by which a guide unit (20, 20′

) that guides the valve rod (12) displaceable in the longitudinal direction (6) is guided in a displaceable manner in the transverse direction (7).

2. Vacuum valve according to claim 1, wherein the bearing unit (17, 17′

) has sections lying on both sides of the guide unit (20, 20′

) with respect to the longitudinal direction (6).

3. Vacuum valve according to claim 2, wherein the guide unit (20, 20′

) is arranged at least partially in a receptacle space (19, 19′

) of the bearing unit (17, 17′

) and is guided in a displaceable manner in the bearing unit in the transverse direction (7).

4. Vacuum valve according to claim 1, wherein the longitudinal drive device (15, 15′

) has at least one piston (25, 25′

) that is connected to the valve rod (12) and is arranged in a cylindrical recess (26, 26′

).

5. Vacuum valve according to claim 4, wherein the cylindrical recess (26, 26′

) is constructed in the guide unit (20, 20′

).

6. Vacuum valve according to claim 1, wherein a force applied by the transverse drive device (16, 16′

) for displacement of the valve rod (12) in the transverse direction (7) acts on the valve rod (12) via the guide unit (20, 20′

) and displaces the guide unit (20, 20′

) while carrying along the valve rod (12) in the transverse direction (7) relative to the bearing unit (17, 17′

).

7. Vacuum valve according to claim 6, wherein the transverse drive device (16′

) has at least one drive part (51) that is displaceable in the longitudinal direction (6) and is connected to the guide unit (20′

) via at least one gear element (54, 55).

8. Vacuum valve according to claim 7, wherein for the parallel displacement of the guide unit (20′

) in the transverse direction (7), the at least one drive part (51) is connected to the guide unit (20′

) via corresponding ones of the gear elements (54, 55) on opposite sides of the drive part (51) with respect to the longitudinal direction (6).

9. Vacuum valve according to claim 8, wherein the gear elements (54, 55) are formed by connecting rods connected in a pivoting fashion to the guide unit (20′

) and in a pivoting fashion to the drive part (51) or to a part (31′

) connected rigidly to the drive part.

10. Vacuum valve according to claim 6, wherein the transverse drive device (16) has at least one piston (29) that is arranged in a cylindrical recess (30) that is constructed in the guide unit (20).

11. Vacuum valve according to claim 10, wherein a pressure space (33) for pressurization of the guide unit (20) in the transverse direction (7) by a pressure medium introduced into the pressure space (33) is provided between the guide unit (20) and the bearing unit (17).

12. Vacuum valve according to claim 1, wherein a spring device (32) is provided between the guide unit (20, 20′

) and the bearing unit (17, 17′

) for pressurization of the guide unit (20, 20′

) in the transverse direction.

13. Vacuum valve according to claim 1, wherein in the closed position of the valve plate (5), a section of the valve rod (12) is supported on a transverse stop (38), and said section projects from the guide unit (20, 20′

) on a side facing away from the valve plate (5).

14. Vacuum valve according to claim 4, wherein the valve rod (12) is guided in a displaceable manner by the guide unit (20′

) on both sides of the piston (25′

) of the longitudinal drive device (15′

).