METHOD FOR PRODUCING A SPEED SENSOR ELEMENT
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Abstract
A method for producing a sensor element, wherein at least parts of the sensor element are subjected to at least one plasma treatment process during production. The plasma treatment process may be either a plasma cleaning process and/or a plasma activation process. During the plasma treatment process, a base element and/or a carrier element of the sensor element is subjected to a plasma treatment process before a placement process and/or before a contact-connecting process with electrical connection means. The sensor element is equipped with at least one measurement probe element and/or at least one electronic circuit. This method is used to produce a sensor element, such as a speed sensor element, that may be used in a motor vehicle.
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Citations
34 Claims
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1-12. -12. (canceled)
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13. A method for producing a sensor element, wherein
at least parts of the sensor element are subjected to at least one plasma treatment process during production.
Specification