HIGH SPEED OPTICAL INSPECTION SYSTEM WITH MULTIPLE ILLUMINATION IMAGERY

• US 20110175997A1
• Filed: 01/23/2009
• Published: 07/21/2011
• Est. Priority Date: 01/23/2008
• Status: Abandoned Application

• Current Assignee: CyberOptics Corporation (Nordson Corporation)
• Original Assignee: CyberOptics Corporation (Nordson Corporation)
• Inventors: Chen, Chuanqi, Haugan, Carl, Beverly, Caruso, Case, Steven K.
• Application Number:
  US12/864,110
• Publication Number:
  US 20110175997A1
• Time in Patent Office: Days
• US Class Current: 348/92
• CPC Class Codes: G01N 21/8806 Specially adapted optical and illumination features
• CPC Class Codes: G01N 21/8903 using a multiple detector array

Abstract

An optical inspection system (92) for inspecting a workpiece (10) including a feature (60) to be inspected is provided. The system (92) includes a workpiece transport conveyor (26) configured to transport the workpiece (10) in a nonstop manner. The system (92) also includes an illuminator (9) configured to provide a first strobed illumination field type and a second strobed illumination field type. An array of cameras (4) is configured to digitally image the feature, wherein the array of cameras (4) is configured to generate a first image of the feature with the first illumination field and a second image of the feature with the second illumination field. A processing device (90) is operably coupled to the illuminator (9) and the array of cameras (4), the processing device (90) provides an inspection result relative to the feature (60) on the workpiece (10) based, at least in part, upon the first and second images.

Claims

1. An optical inspection system for inspecting a workpiece including a feature to be inspected, the system comprising:

a workpiece transport conveyor configured to transport the workpiece in a nonstop manner; and

an illuminator configured to provide a first strobed illumination field type and a second strobed illumination field type;

an array of cameras configured to digitally image the feature, wherein the array of cameras is configured to generate a first image of the feature with the first illumination field and a second image of the feature with the second illumination field; and

a processing device operably coupled to the illuminator and the array of cameras, the processing device being configured to provide an inspection result relative to the feature on the workpiece based, at least in part, upon the first and second images.

2. The optical inspection system of claim 1, wherein an inspection region of interest, that includes the feature on the workpiece, is defined and stored in the processing device.

3. The optical inspection system of claim 2, wherein a first inspection is based on the first image, a second inspection is based on the second image, and the inspection result is based on the first and second inspections.

4. The optical inspection system of claim 2 wherein a third image of the inspection region is generated that is a linear combination from the region of interest in the first and second images.

5. The optical inspection system of claim 4, wherein the inspection result is based upon the third image.

6. The optical inspection system of claim 4, wherein the linear combination is a function that is defined relative to the region of interest.

7. The optical inspection system of claim 1, wherein the first illumination field is brightfield illumination.

8. The optical inspection system of claim 7, wherein the second illumination field is darkfield illumination.

9. The optical inspection system of claim 1, wherein the first illumination type is darkfield illumination.

10. The optical inspection system of claim 1, wherein each camera in the array of cameras is disposed to generate an image having a field of view that overlaps that of an adjacent camera.

11. The optical inspection system of claim 10, wherein the processing device is configured to cause the camera array to acquire columnar images that have fields of view that overlap with one another in a scan direction.

12. The optical inspection system of claim 11, wherein the first image is generated by stitching individual images from each camera, taken during energization of the first strobed illumination field type, together to form a columnar image, and stitching columnar images together.

13. The optical inspection system of claim 12, wherein the first image is geometrically corrected.

14. The optical inspection system of claim 12, wherein the second image is generated by stitching individual images from each camera, taken during energization of the second strobed illumination field type, together to form a columnar image, and stitching columnar images together.

15. The optical inspection system of claim 1, wherein the illuminator includes an illuminator enclosure that houses first and second illumination sources.

16. The optical inspection system of claim 15, wherein at least one of the first and second illumination sources is a xenon arc discharge lamp.

17. The optical inspection system of claim 15, wherein an interior surface of the illuminator enclosure has a highly reflective surface.

18. The optical inspection system of claim 17, wherein the highly reflective surface is configured to scatter light in multiple directions.

19. The optical inspection system of claim 15, wherein the illuminator enclosure includes an number of apertures, and respective cameras of the camera array are disposed to look through respective apertures of the illuminator enclosure.

20. The optical inspection system of claim 1, wherein the processing device stores data indicative of a plurality of regions of interest on the workpiece, and data indicative of a respective combination of first and second images for each region of interest, wherein at least two of the respective combinations differ from one another.

21. The optical inspection system of claim 1, wherein the illuminator is configured to provide an additional strobed illumination field type, and wherein the array of cameras is configured to acquire a third image of the feature with the additional illumination field.

22. A method of inspecting an article of manufacture having at least one region of interest to provide an inspection result, the method comprising:

generating relative motion between the article of manufacture and a camera array;

acquiring a first set of images with the camera array during the relative motion and while strobing a first illumination field type upon the article of manufacture;

acquiring a second set of images with the camera array during the relative motion and while strobing a second illumination field type upon the article of manufacture;

generating a first stitched image with the first set of images;

generating a second stitched image with the second set of images;

determining an inspection result relative to the at least one region of interest based upon the first and second stitched images; and

providing the inspection result.

23. The method of claim 22, wherein information defining each of the at least one region of interest is stored in a processing device.

24. The method of claim 23, and further comprising generating a third image of at least one region of interest as a linear combination in the first and second stitched images.

25. The method of claim 24, wherein the inspection result is based upon the third image.

26. The method of claim 24, wherein the linear combination is a function that is defined relative to the region of interest.

27. The method of claim 22, wherein the method begins automatically upon reception of a board detect signal.

28. The method of claim 22, wherein acquiring the first and second sets of images is triggered based upon a position encoder signal.

29. The method of claim 22, wherein acquiring the first and second sets of images is triggered based upon time.

30. An optical inspection system for inspecting a workpiece including a feature to be inspected, the system comprising:

a workpiece transport conveyor configured to transport the workpiece in a nonstop manner; and

an illuminator configured to provide a first strobed illumination having a first angular spectrum with respect to the feature and a second strobed illumination having a second angular spectrum with respect to the feature, wherein the first and second angular spectrums differ from one another;

an array of cameras configured to digitally image the feature, wherein the array of cameras is configured to generate a first image of the feature using the first strobed illumination and a second image of the feature using the second strobed illumination; and

a processing device operably coupled to the illuminator and the array of cameras, the processing device being configured to provide an inspection result relative to the feature on the workpiece based, at least in part, upon the first and second images.

31. The optical inspection system of claim 30, wherein the first strobed illumination has a first color, and the second strobed illumination has a second color, and wherein the first and second colors differ from one another.

32. The optical inspection system of claim 30, wherein one of the first and second strobed illuminations is a backlight strobed illumination.

33. The optical inspection system of claim 30, and further comprising a buffer memory operably coupled to the array of cameras to store the first and second images.