PHYSICAL QUANTITY SENSOR SYSTEM AND PHYSICAL QUANTITY SENSOR DEVICE
First Claim
1. A physical quantity sensor system configured to drive a physical quantity sensor that vibrates from self-excitation by application of a drive signal to output a monitor signal responsive to the self-excited vibration and also output a sensor signal according to a physical quantity given externally, and detect a physical quantity signal corresponding to the physical quantity from the sensor signal, the system comprising:
- an analog-to-digital conversion circuit configured to convert the monitor signal and the sensor signal to a digital monitor signal and a digital sensor signal, respectively;
a drive control circuit configured to control the drive signal according to the digital monitor signal;
a phase adjustment circuit configured to adjust the phase difference between the digital monitor signal and the digital sensor signal so that the phases of the digital monitor signal and the digital sensor signal match with each other; and
a detection circuit configured to detect the physical quantity signal by multiplying the digital monitor signal by the digital sensor signal after the phase difference adjustment by the phase adjustment circuit.
1 Assignment
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Accused Products
Abstract
A physical quantity sensor system drives a physical quantity sensor and detects a physical quantity signal from a sensor signal. An analog-to-digital conversion circuit respectively converts a monitor signal and the sensor signal to a digital monitor signal and a digital sensor signal. A drive control circuit controls a drive signal according to the digital monitor signal. A phase adjustment circuit adjusts the phase difference between the digital monitor signal and the digital sensor signal. A detection circuit detects the physical quantity signal by multiplying the digital monitor signal by the digital sensor signal after the phase difference adjustment by the phase adjustment circuit.
62 Citations
20 Claims
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1. A physical quantity sensor system configured to drive a physical quantity sensor that vibrates from self-excitation by application of a drive signal to output a monitor signal responsive to the self-excited vibration and also output a sensor signal according to a physical quantity given externally, and detect a physical quantity signal corresponding to the physical quantity from the sensor signal, the system comprising:
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an analog-to-digital conversion circuit configured to convert the monitor signal and the sensor signal to a digital monitor signal and a digital sensor signal, respectively; a drive control circuit configured to control the drive signal according to the digital monitor signal; a phase adjustment circuit configured to adjust the phase difference between the digital monitor signal and the digital sensor signal so that the phases of the digital monitor signal and the digital sensor signal match with each other; and a detection circuit configured to detect the physical quantity signal by multiplying the digital monitor signal by the digital sensor signal after the phase difference adjustment by the phase adjustment circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification