APPARATUS FOR CONTROLLING TEMPERATURE UNIFORMITY OF A SHOWERHEAD
First Claim
1. An apparatus for controlling thermal uniformity of a substrate-facing surface of a showerhead, comprising:
- a showerhead having a substrate facing surface and one or more plenums for providing one or more process gases through a plurality of gas distribution holes formed through the substrate facing surface of the showerhead; and
a plurality of flow paths having a substantially equivalent fluid conductance disposed within the showerhead to flow a heat transfer fluid.
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Accused Products
Abstract
An apparatus for controlling thermal uniformity of a substrate-facing surface of a showerhead is provided herein. In some embodiments, the thermal uniformity of the substrate facing surface of the showerhead may be controlled to be more uniform. In some embodiments, the thermal uniformity of the substrate facing surface of the showerhead may be controlled to be non-uniform in a desired pattern. In some embodiments, an apparatus for controlling thermal uniformity of a substrate-facing surface of a showerhead may include a showerhead having a substrate facing surface and one or more plenums for providing one or more process gases through a plurality of gas distribution holes formed through the substrate facing surface of the showerhead; and a plurality of flow paths having a substantially equivalent fluid conductance disposed within the showerhead to flow a heat transfer fluid.
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Citations
20 Claims
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1. An apparatus for controlling thermal uniformity of a substrate-facing surface of a showerhead, comprising:
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a showerhead having a substrate facing surface and one or more plenums for providing one or more process gases through a plurality of gas distribution holes formed through the substrate facing surface of the showerhead; and a plurality of flow paths having a substantially equivalent fluid conductance disposed within the showerhead to flow a heat transfer fluid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An apparatus for controlling thermal uniformity of a substrate-facing surface of a showerhead, comprising:
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a showerhead having a substrate facing surface and one or more plenums for providing one or more process gases through a plurality of gas distribution holes formed through the substrate facing surface of the showerhead; and a flow path disposed within the showerhead and having an inlet and an outlet to flow a heat transfer fluid through the flow path, wherein the flow path comprises a first portion and a second portion, each portion having a substantially equivalent axial length, wherein the first portion is spaced about 2 mm to about 10 mm from the second portion, and wherein the first portion provides a flow of heat transfer fluid in a direction opposite a flow of heat transfer fluid of the second portion.
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20. An apparatus for controlling thermal uniformity of a substrate-facing surface of a showerhead, comprising:
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a showerhead having a substrate facing surface and one or more plenums for providing one or more process gases through a plurality of gas distribution holes formed through the substrate facing surface of the showerhead; and a first flow path and a second flow path disposed within the showerhead, each having an inlet and an outlet to flow a heat transfer fluid through the respective flow path, wherein each flow path has a substantially equivalent axial length, and wherein the first flow path and the second flow path a inversely symmetrical about an axis that passes through a central axis of the showerhead.
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Specification