Method for Detection of Gases by Laser Spectroscopy, and Gas Sensor

• US 20110181879A1
• Filed: 07/01/2009
• Published: 07/28/2011
• Est. Priority Date: 07/09/2008
• Status: Active Grant

• Current Assignee: Siemens AG
• Original Assignee: Siemens AG
• Inventors: Chen, Jia, Hangauer, Andreas, Strzoda, Rainer
• Granted Patent: US 8,830,469 B2
• Time in Patent Office: Days
• US Class Current: 356/318
• CPC Class Codes: G01N 2021/399 Diode laser
• CPC Class Codes: G01N 21/274 Calibration, base line adjustment, drift correction
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis
• CPC Class Codes: G01N 21/39 using tunable lasers
• CPC Class Codes: G01N 2201/127 Calibration; base line adjustment; drift compensation

Abstract

A method and a sensor for detecting a target gas by laser spectroscopy using a laser or a laser diode having a monochrome emission wavelength that can be modulated by varying the operating temperature or the operating current. The wavelength range of the target gas comprises a first modulation of the laser or the laser diode over a first large modulation width, in addition to at least two absorption lines of a reference gas and at least one absorption line of the target gas. The absorption lines are used to calibrate the wavelength scale of the laser or the laser diode in relation to the varied operating temperature or operating current, a second modulation of the laser or the laser diode being performed over a second small modulation width, with the at least one absorption line of the target gas, for detecting the target gas.

Claims

1-10. -10. (canceled)

11. A method for detecting at least one target gas by laser spectroscopy using one of a laser and a laser diode having a monochromic emission wavelength and which is tuneable by varying one of an operating temperature and operating current, the method comprising:

first tuning of the one of the laser and the laser diode over a first broad tuning width in a wavelength range of one band of the at least one target gas, at least two absorption lines of a reference gas and at least one absorption line of the at least one target gas being included in the first tuning width, for calibration of a wavelength scale of the one of the laser and the laser diode relative to one of a varied operating temperature and a varied operating current;

second tuning of the one of the laser and the laser diode over a second, narrow tuning width in the wavelength range of the one band of the at least one target gas, the second, narrow tuning width at which the second tuning is performed being narrower than the first broad tuning width, at least one of the at least one absorption line of the at least one target gas being included in the second tuning width, for detection of the at least one target gas; and

detecting the at least one gas by laser spectroscopy using the one of the laser and the laser diode;

wherein the target gas and reference gas are different gases.

12. The method as claimed in claim 11, wherein, in addition to detecting the at least one target gas, a concentration of the at least one target gas is measured.

13. The method as claimed in claim 11, wherein at least one of the at least two absorption lines of the reference gas is replaced by one of the at least one absorption line of the at least one target gas, if a minimum concentration of the at least one target gas is continuously present.

14. The method as claimed in claim 12, wherein at least one of the at least two absorption lines of the reference gas is replaced by one of the at least one absorption line of the at least one target gas, if a minimum concentration of the at least one target gas is continuously present.

15. The method as claimed in claim 11, wherein a measurement cell and a reference gas cell are connected in series in a beam path of the one of the laser and the laser diode.

16. The method as claimed in claim 11, wherein the first tuning is performed for calibration of one of the operating current and the operating temperature using an absolute wavelength scale, and the second tuning is successively performed for a plurality of times to detect the at least one target gas.

17. The method as claimed in claim 11, wherein an absorption spectrum during the second tuning over the second, narrow tuning width is compared with a calculated absorption spectrum, and wherein non-iterative curve matching is used with a linear regression algorithm to allow calculation of a concentration of the at least one target gas in a single step.

18. A sensor for detection of at least one target gas by laser spectroscopy, the sensor comprising:

a measurement cell;

an evaluation unit;

one of a laser and a laser diode having a monochromic emission wavelength and which is tuneable by varying one of an operating temperature and operating current, the one of the laser and the laser diode further having a tuning range such that at least two absorption lines of a reference gas and at least one absorption line of the at least one target gas are covered in a first, broad tuning width during a tuning process; and

a photodetector including a housing in which a reference gas cell is accommodated and which is positioned in front of the photodetector such that the measurement cell and the reference cell gas are connected in series with respect to a beam path of the laser or laser diode;

wherein the target gas and the reference gas are different gases.

19. The sensor as claimed in claim 18, wherein the laser or laser diode is tuneable by varying the operating current, and covers an emission wavelength in a band of carbon monoxide at 2.3 μ

m, and wherein the at least one of the laser the laser diode is tuneable over a wavelength range which allows spectrally resolved absorption measurement of reference and target gas lines.

20. The sensor as claimed in claim 18, wherein, the at least one of the laser and the laser diode is a vertically emitting laser diode.

21. The sensor as claimed in claim 18, wherein the at least one of the laser and the laser diode is tuneable over at least 0.5 nm.

22. The sensor as claimed in claim 20, wherein the vertically emitting laser diode is a vertical cavity surface emitting laser (VCSEL).