High Pressure Apparatus and Method for Nitride Crystal Growth
First Claim
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1. Apparatus for high pressure material processing, the apparatus comprising:
- a cylindrical capsule region including a first region and a second region, having a length between the first region and the second region;
a heating member enclosing the cylindrical capsule region;
a sleeve member adapted to form a sealed region enclosing the heating member, the sealed region being characterized by an internal pressure level capable of tightening a contact between the sleeve member and a seal;
a gas pressure intensifier for pumping gaseous species into the sealed region at a predetermined range of pressure levels;
at least one annular ceramic member having a predetermined thickness disposed continuously around a perimeter of the sleeve member, the annular member being made of a material having a compressive strength of at least 0.5 GPa and having a thermal conductivity of less than about 4 watts per meter-Kelvin; and
a high strength enclosure material over the annular ceramic member to form a high strength enclosure.
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Abstract
An improved high pressure apparatus and methods for processing supercritical fluids is described. The apparatus includes a capsule, a heater, and at least one ceramic ring contained by a metal sleeve. The apparatus is capable of accessing pressures and temperatures of 0.2-2 GPa and 400-1200° C.
177 Citations
20 Claims
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1. Apparatus for high pressure material processing, the apparatus comprising:
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a cylindrical capsule region including a first region and a second region, having a length between the first region and the second region; a heating member enclosing the cylindrical capsule region; a sleeve member adapted to form a sealed region enclosing the heating member, the sealed region being characterized by an internal pressure level capable of tightening a contact between the sleeve member and a seal; a gas pressure intensifier for pumping gaseous species into the sealed region at a predetermined range of pressure levels; at least one annular ceramic member having a predetermined thickness disposed continuously around a perimeter of the sleeve member, the annular member being made of a material having a compressive strength of at least 0.5 GPa and having a thermal conductivity of less than about 4 watts per meter-Kelvin; and a high strength enclosure material over the annular ceramic member to form a high strength enclosure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for operating a high pressure crystal growth apparatus, the method comprising:
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providing an apparatus for high pressure material processing, the apparatus comprising a cylindrical capsule having a first region and a second region, and a length defined between the first region and the second region, an annular heating member enclosing the capsule, a sleeve enclosing the annular heating member having predetermined thickness disposed continuously around the sleeve, and a high strength enclosure material disposed over the annular member; placing a baffle, nutrient, mineralizer, and a plurality of seed crystals within the capsule or liner; forming a gas-tight seal between each of regions of the cylindrical capsule or liner, the environment of the annular heating member, and the exterior of the apparatus; filling a predetermined fraction of the interior of the capsule or liner with a solvent and sealing the capsule or liner; filling one or more inert gases into the environment of the annular heating member; processing the cylindrical capsule or liner with a thermal energy to cause an increase in temperature within the capsule or liner to greater than 200 Degrees Celsius to cause the solvent to be heat to a superheated state; forming a crystalline material from a process of the superheated solvent; removing thermal energy from the cylindrical capsule or liner to cause a temperature of the liner to change from a first temperature to a second temperature, the second temperature being lower than the first temperature; removing the solvent from the capsule or liner; opening a top portion of the apparatus; exposing at least one region of the cylindrical capsule or liner; and removing the crystalline material. - View Dependent Claims (17, 18, 19, 20)
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Specification