ROTATIONAL VIBRATION GYRO
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Abstract
A rotational vibration type gyro 1 is provided by which a detection sensitivity influence of the other axis direction on detection sensitivity in a detection axis direction. The rotational vibration type gyro 1 has: a drive weight 4, drive electrodes 3, a detection weight 5 having a pair of X-axis divisional detection weights 5A, 5A and a pair of Y-axis divisional detection weights 5B, 5B, an anchor 6, a pair of X-axis weight support springs 7A, 7A and a pair of Y-axis weight support springs 7B, 7B, a pair of X-axis weight connection springs 8A, 8A and a pair of Y-axis weight connection springs 8B, 8B, and a pair of X-axis detection electrodes 9A, 9A and a pair of Y-axis detection electrodes 9B, 9B.
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Citations
16 Claims
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1-7. -7. (canceled)
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8. A rotational vibration type gyro comprising:
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a drive weight in shape of a circular flat plate; a drive electrode that rotationally vibrates the drive weight around a Z-axis which passes through a center thereof; a detection weight that is disposed inside the drive weight and that has a pair of X-axis divisional detection weights in a flat plate shape vibrated with the drive weight by Coriolis force generated at the drive weight and a pair of Y-axis divisional detection weights in a flat plate shape vibrated independently from each of the X-axis divisional detection weights with the drive weight by the Coriolis force generated at the drive weight; an anchor that is projected inside the detection weight on a substrate and that supports the drive weight through the detection weight; a pair of X-axis weight support springs that are suspended between the anchor and each of the X-axis divisional detection weights and that function as hinge of each of the vibrating X-axis divisional detection weights, and a pair of Y-axis weight support springs that are suspended between the anchor and each of the Y-axis divisional detection weights and that function as hinge of each of the vibrating Y-axis divisional detection weights; a pair of X-axis weight connection springs that have an absorbing function for the rotational vibration and a transmitting function for the Coriolis force and that connect the drive weight and each of the X-axis divisional detection weights, and a pair of Y-axis weight connection springs that have an absorbing function for the rotational vibration and a transmitting function for the Coriolis force and that connect the drive weight and each of the Y-axis divisional detection weights; and a pair of X-axis detection electrodes that detect displacement of the vibrating pair of X-axis divisional detection weights and/or a pair of Y-axis detection electrodes that detect displacement of the vibrating pair of Y-axis divisional detection weights; each of the X-axis weight connection springs being disposed in an X-axis, and each of the Y-axis weight connection springs being disposed in a Y-axis. - View Dependent Claims (9, 10, 11, 12, 13, 15, 16)
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14. A rotational vibration type gyro comprising:
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a drive weight in shape of a flat plate; a drive electrode that rotationally vibrates the drive weight around a Z-axis which passes through a center thereof; a detection weight that is disposed outside the drive weight to surround the drive weight and that has a pair of X-axis divisional detection weights in a flat plate fan shape vibrated with the drive weight by Coriolis force generated at the drive weight and a pair of Y-axis divisional detection weights in a flat plate fan shape vibrated independently from each of the X-axis divisional detection weights with the drive weight by the Coriolis force generated at the drive weight; an anchor that is projected outside the detection weight on a substrate, that supports the detection weight and that supports the drive weight through the detection weight; a pair of X-axis weight support springs that are suspended between the anchor and each of the X-axis divisional detection weights and that function as hinge of each of the vibrating X-axis divisional detection weights, and a pair of Y-axis weight support springs that are suspended between the anchor and each of the Y-axis divisional detection weights and that function as hinge of each of the vibrating Y-axis divisional detection weights; a pair of X-axis weight connection springs that have an absorbing function for the rotational vibration and a transmitting function for the Coriolis force and that connect the drive weight and each of the X-axis divisional detection weights, and a pair of Y-axis weight connection springs that have an absorbing function for the rotational vibration and a transmitting function for the Coriolis force and that connect the drive weight and each of the Y-axis divisional detection weights; and a pair of X-axis detection electrodes that detect displacement of the vibrating pair of X-axis divisional detection weights and/or a pair of Y-axis detection electrodes that detect displacement of the vibrating pair of Y-axis divisional detection weights; each of the X-axis weight connection springs being disposed in an X-axis, and each of the Y-axis weight connection springs being disposed in a Y-axis.
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Specification