Method for Producing a Subminiature "Micro-Chip" Oxygen Sensor for Control of Internal Combustion Engines or Other Combustion Processes, Oxygen Sensor and an Exhaust Safety Switch
First Claim
1. A method of making an oxygen sensor, comprising:
- depositing on a dielectric substrate multiple resistive heater circuits;
depositing second dielectric layers on the resistive heater circuits;
depositing conductive intermeshing comb electrodes on the dielectric layer or on the substrate on the opposite side of the heater pattern;
applying one of n-type or p-type high temperature semiconductors on the comb electrodes bridging the gap between the legs of the combs;
applying porous dielectric protective layers containing catalytic precious metals on the semiconductors; and
isolating individual elements via a singulation process to produce multiple individual oxygen or gas sensor elements.
4 Assignments
0 Petitions
Accused Products
Abstract
A method of making a sub-miniature “micro-chip” oxygen sensor is provided where multiple sensor elements are applied to a dielectric ceramic substrate consisting of a heater pattern, followed by a dielectric layer. Intermeshing electrodes are then applied either over the heater pattern/dielectric layers or on the opposite side of the substrate. The space between the intermeshing electrodes is filled with an n-type or p-type high temperature semiconductor which is covered by a porous protection layer. After singulation (dicing), the sensor element is assembled having conductors applied to the contact pads on the element and is packaged in an assembly for introduction to the exhaust stream of a combustion process. A large step-wise change in the resistance of the element takes place as a result of changes in oxygen content in the exhaust whereby one can determine if the exhaust is rich or lean for use in an engine management or combustion management systems for emissions control. A circuit is proposed to convert the change in resistance to a voltage signal to be used for control algorithms in engine or combustion control. Utilizing multiple units of the device for individual cylinder control of multi-cylinder engines is described. A method of using one embodiment of the invention for use as a safety switch is also revealed.
37 Citations
21 Claims
-
1. A method of making an oxygen sensor, comprising:
-
depositing on a dielectric substrate multiple resistive heater circuits; depositing second dielectric layers on the resistive heater circuits; depositing conductive intermeshing comb electrodes on the dielectric layer or on the substrate on the opposite side of the heater pattern; applying one of n-type or p-type high temperature semiconductors on the comb electrodes bridging the gap between the legs of the combs; applying porous dielectric protective layers containing catalytic precious metals on the semiconductors; and isolating individual elements via a singulation process to produce multiple individual oxygen or gas sensor elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 21)
-
-
8. An oxygen sensor for sensing exhaust gases from a combination process, comprising:
-
a fired ceramic dielectric substrate; at least one heater circuit adhered to a surface of the substrate, with at least one dielectric layer encapsulating the heater circuit to provide electrical isolation; and at least one electrode adhered on the substrate apart from the dielectric layer encapsulated pattern of heater circuit. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
-
Specification