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Method for Producing a Subminiature "Micro-Chip" Oxygen Sensor for Control of Internal Combustion Engines or Other Combustion Processes, Oxygen Sensor and an Exhaust Safety Switch

  • US 20110186446A1
  • Filed: 12/29/2010
  • Published: 08/04/2011
  • Est. Priority Date: 01/29/2010
  • Status: Active Grant
First Claim
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1. A method of making an oxygen sensor, comprising:

  • depositing on a dielectric substrate multiple resistive heater circuits;

    depositing second dielectric layers on the resistive heater circuits;

    depositing conductive intermeshing comb electrodes on the dielectric layer or on the substrate on the opposite side of the heater pattern;

    applying one of n-type or p-type high temperature semiconductors on the comb electrodes bridging the gap between the legs of the combs;

    applying porous dielectric protective layers containing catalytic precious metals on the semiconductors; and

    isolating individual elements via a singulation process to produce multiple individual oxygen or gas sensor elements.

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