ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION
First Claim
Patent Images
1. An electromechanical device comprising:
- a substrate;
an actuation electrode; and
a movable element between the substrate and the actuation electrode, the movable element including a deformable layer and a reflective element each being between the substrate and the actuation electrode, the deformable layer spaced from the reflective element along a direction generally perpendicular to the reflective element.
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Abstract
A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.
127 Citations
34 Claims
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1. An electromechanical device comprising:
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a substrate; an actuation electrode; and a movable element between the substrate and the actuation electrode, the movable element including a deformable layer and a reflective element each being between the substrate and the actuation electrode, the deformable layer spaced from the reflective element along a direction generally perpendicular to the reflective element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. An electromechanical device comprising:
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means for moving a portion of the device, the moving means including means for deforming and means for reflecting, the deforming means spaced from the reflecting means along a direction generally perpendicular to the reflecting means; means for supporting the moving means; and means for actuating the moving means, the moving means including both the deforming means and the reflecting means each being between the supporting means and the actuating means. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27)
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28. A method for modulating light, comprising:
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providing a display element including a substrate, a movable element, and an actuation electrode, the movable element including a deformable layer and a reflective element each being between the substrate and the actuation electrode, the deformable layer spaced from the reflective element along a direction generally perpendicular to the reflective element; and applying a voltage to the actuation electrode, the voltage generating an attractive force on the movable element, thereby causing the movable element to move away from the substrate. - View Dependent Claims (29, 30, 31, 32, 33, 34)
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Specification