MICROELECTROMECHANICAL DEVICE WITH RESTORING ELECTRODE
First Claim
1. A method for resetting at least one mirror comprising:
- applying a reset voltage to an encapsulation membrane in a deflectable mirror assembly; and
discontinuing application of the reset voltage after deflection of a mirror within the mirror assembly from an actuated position to a rest position.
3 Assignments
0 Petitions
Accused Products
Abstract
Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using chemical (e.g., water) or a plasma based etch process to remove the sacrificial layer.
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Citations
20 Claims
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1. A method for resetting at least one mirror comprising:
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applying a reset voltage to an encapsulation membrane in a deflectable mirror assembly; and discontinuing application of the reset voltage after deflection of a mirror within the mirror assembly from an actuated position to a rest position. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of moving at least one mirror in a mirror assembly, the method comprising:
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applying an actuation voltage across a substrate and the at least one mirror, the at least one mirror spaced from the substrate by a first gap; actuating the at least one mirror to deflect towards the substrate to an actuated position; applying a reset voltage to an encapsulation membrane comprising electrically conductive material, the encapsulation membrane spaced from the at least one mirror by a second gap, the at least one mirror being positioned between the substrate and the encapsulation membrane; and discontinuing application of the reset voltage. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of making a mirror device comprising:
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depositing spacer layers and patterns on a base substrate having address circuitry; constructing elements of the mirror device on the base substrate, the elements including an electrode and a mirror; constructing an optically transparent substrate in sealed overlying relationship with the mirror after removal of the spacer layers; and forming at least one reset electrode, the reset electrode connected to the optically transparent substrate. - View Dependent Claims (20)
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Specification