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MICROELECTROMECHANICAL DEVICE WITH RESTORING ELECTRODE

  • US 20110188110A1
  • Filed: 01/28/2011
  • Published: 08/04/2011
  • Est. Priority Date: 05/01/1995
  • Status: Abandoned Application
First Claim
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1. A method for resetting at least one mirror comprising:

  • applying a reset voltage to an encapsulation membrane in a deflectable mirror assembly; and

    discontinuing application of the reset voltage after deflection of a mirror within the mirror assembly from an actuated position to a rest position.

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