Methods of making copper selenium precursor compositions with a targeted copper selenide content and precursor compositions and thin films resulting therefrom
First Claim
Patent Images
1. A liquid-based preliminary precursor composition comprising:
- a solvent comprising a primary amine; and
a solute comprising copper and selenium wherein the preliminary precursor composition is substantially free of oxygen-containing compounds.
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Abstract
Precursor compositions containing copper and selenium suitable for deposition on a substrate to form thin films suitable for semi-conductor applications. Methods of forming the precursor compositions using primary amine solvents and methods of forming the thin films wherein the selection of temperature and duration of heating controls the formation of a targeted species of copper selenide.
104 Citations
30 Claims
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1. A liquid-based preliminary precursor composition comprising:
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a solvent comprising a primary amine; and a solute comprising copper and selenium wherein the preliminary precursor composition is substantially free of oxygen-containing compounds. - View Dependent Claims (2, 3, 4, 5, 6, 7, 24)
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8. A precursor composition comprising:
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a liquid-based solvent comprising a primary amine; and a solute comprising copper and selenium, the precursor composition being substantially free of oxygen containing compounds and at least substantially devoid of a precipitate comprising Cu2Se. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 25, 26, 27, 28, 29, 30)
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Specification