ATOMIC LAYER ETCHING APPARATUS AND ETCHING METHOD USING THE SAME

• US 20110192820A1
• Filed: 02/25/2010
• Published: 08/11/2011
• Est. Priority Date: 02/09/2010
• Status: Abandoned Application

• Current Assignee: Sungkyunkwan University Foundation For Corporate Collaboration (SungKyunKwan University)
• Original Assignee: Sungkyunkwan University Foundation For Corporate Collaboration (SungKyunKwan University)
• Inventors: Lim, Woong-Sun, Kim, Yi-Yeon, Park, Sang-Duk, Yeon, Je-Kwan, Park, Byoung-Jae, Yeom, Geun-Young
• Application Number:
  US12/712,944
• Publication Number:
  US 20110192820A1
• Time in Patent Office: Days
• US Class Current: 216/67
• CPC Class Codes: H01J 37/32009 Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources plasma generation in general H05H1/24
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32422 Arrangement for selecting ions or species in the plasma
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 21/32137 of silicon-containing layers

Abstract

An atomic layer etching apparatus using reactive radicals and neutral beams and an etching method using the same are provided. The atomic layer etching apparatus includes a reaction chamber including a stage on which a substrate to be etched is seated, a plasma generator including a plasma chamber configured to supply reactive radicals and neutral beams into the reaction chamber and receive a source gas to generate plasma, an inductive coil configured to surround the exterior of the plasma chamber to generate an electric field, a grid assembly disposed at a lower part of the plasma chamber and including first, second and third grids for extracting ion beams, and a reflective body disposed under the grid assembly and configured to supply electrons to the ion beams to convert the ion beams into neutral beams, a shutter installed between the plasma generator and the reactive chamber and configured to adjust supply of the neutral beams into the reaction chamber, a purge gas supply part configured to supply a purge gas into the reaction chamber, and a controller configured to control supply of the source gas, an etching gas and the purge gas, and opening/closing of the shutter.

Claims

1. An atomic layer etching apparatus comprising:

a reaction chamber including a stage on which a substrate to be etched is seated;

a plasma generator including a plasma chamber configured to supply reactive radicals and neutral beams into the reaction chamber and receive a source gas to generate plasma, an inductive coil configured to surround the exterior of the plasma chamber to generate an electric field, a grid assembly disposed at a lower part of the plasma chamber and including first, second and third grids for extracting ion beams, and a reflective body disposed under the grid assembly and configured to supply electrons to the ion beams to convert the ion beams into neutral beams;

a shutter installed between the plasma generator and the reactive chamber and configured to adjust supply of the neutral beams into the reaction chamber;

a purge gas supply part configured to supply a purge gas into the reaction chamber; and

a controller configured to control supply of the source gas, an etching gas and the purge gas, and opening/closing of the shutter.

2. The atomic layer etching apparatus according to claim 1, wherein the first, second and third grids of the grid assembly are spaced apart a predetermined distance from each other, and

the first grid receives a positive voltage, the second grid receives a negative voltage, and the third grid receives a positive voltage to extract and accelerate ion beams.

3. An etching method using an atomic layer etching apparatus, the method comprising:

loading a substrate, in which a layer to be etched is exposed, on a stage in a reaction chamber;

reactively supplying radicals generated from a plasma generator disposed at an upper part of the reaction chamber into the reaction chamber to adsorb the radicals to a surface of the exposed layer;

supplying a purge gas through a purge gas supply part installed at one side of the reaction chamber, and removing excessive radicals remaining after the adsorption;

irradiating neutral beams generated from the plasma generator to the layer to which the radicals are adsorbed, and removing a surface material of the layer with the radicals; and

supplying a purge gas and removing etching byproducts generated by irradiation of the neutral beams.

4. The etching method according to claim 3, wherein the plasma generator comprises:

a plasma chamber configured to receive a source gas to generate plasma, an inductive coil configured to surround the exterior of the plasma chamber to generate an electric field, a grid assembly disposed at a lower part of the plasma chamber and including first, second and third grids for extracting ion beams, and a reflective body disposed under the grid assembly and configured to supply electrons to the ion beams to convert the ion beams into neutral beams.

5. The etching method according to claim 4, wherein, in supplying the reactive radicals, electric power is not supplied to the grid assembly.

6. The etching method according to claim 4, wherein, in irradiating the neutral beams and removing the surface material of the layer to be etched and the radicals,

the first grid of the grid assembly receives a positive voltage, the second grid receives a negative voltage, and the third grid receives a positive voltage.

7. The etching method according to claim 4, wherein, in irradiating the neutral beams and removing the surface material of the layer to be etched and the radicals,

the voltages applied to the second and third grids are adjusted to control acceleration energy of the neutral beams such that sputtering is not generated from the surface of the layer to be etched.

8. The etching method according to claim 4, wherein in irradiating the neutral beams and removing the surface material of the layer to be etched and the radicals,

ion beams are extracted from an ionic material in plasma through the grid assembly, and converted into neutral beams by the reflective body disposed on a progression path of the extracted ion beams and then irradiated.

9. The etching method according to claim 3, wherein the purge gas is nitrogen gas.