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OSCILLATOR DEVICE

  • US 20110193449A1
  • Filed: 10/08/2009
  • Published: 08/11/2011
  • Est. Priority Date: 10/08/2008
  • Status: Active Grant
First Claim
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1. An oscillator device, comprising:

  • a resonator mass connected by a spring arrangement to a substrate;

    a feedback element for controlling oscillation of the resonator mass, which comprises a piezoresistive element connected to the resonator mass and which is arranged such that strain in the piezoresistive element varies in response to movement of the resonator mass, and a change in strain in the piezoresistive element causes a change in electrical resistance;

    a driver for driving a current through the feedback element; and

    an actuator for controlling the oscillation which includes terminals for driving the current through the feedback element.

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