CAPACITIVE SENSING SYSTEM

• US 20110193574A1
• Filed: 12/23/2010
• Published: 08/11/2011
• Est. Priority Date: 12/31/2009
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: Mapper Lithography IP B.V (ASML Holding NV)
• Inventors: Mossel, Robert, Van Baar, Johnny Joannes Jacobus, Vergeer, Niels, Padhye, Kaustubh Prabodh, Steenbrink, Stijn Willem Herman Karel, DE BOER, Guido
• Granted Patent: US 8,570,055 B2
• Time in Patent Office: Days
• US Class Current: 324/688
• CPC Class Codes: G01B 7/023 for measuring distance between sensor and object G01B7/082 and G01B7/102 take precedence
• CPC Class Codes: G01D 3/036 on measuring arrangements themselves
• CPC Class Codes: G01D 5/2417 by varying separation
• CPC Class Codes: G03F 9/7026 Focusing
• CPC Class Codes: G03F 9/7053 Non-optical, e.g. mechanical, capacitive, using an electron beam, acoustic or thermal waves

Abstract

A capacitive sensing system, comprising a sensor having thin film structure, the thin film structure comprising a sensor having a first insulating layer and a first conductive film comprising a sensing electrode formed on a first surface of the first insulating layer and a second conductive film comprising a back guard electrode. The back guard electrode is formed in a single plane and comprises a peripheral portion in the same plane, and is disposed on a second surface of the first insulating layer and a first surface of a second insulating layer or protective layer. The peripheral portion of the back guard electrode extends beyond the sensing electrode to form a side guard electrode which substantially or completely surrounds the sensing electrode.

Claims

1. A capacitive sensing system comprising a sensor having thin film structure, the thin film structure comprising a sensor having a first insulating layer and a first conductive film comprising a sensing electrode formed on a first surface of the first insulating layer, a second conductive film comprising a back guard electrode, the back guard electrode formed in a single plane and comprising a peripheral portion in the same plane, the back guard electrode disposed on a second surface of the first insulating layer and a first surface of a second insulating layer or protective layer, wherein the peripheral portion of the back guard electrode extends beyond the sensing electrode to form a side guard electrode which substantially or completely surrounds the sensing electrode.

2. The capacitive sensing system of claim 1, wherein the thin film structure further comprises an elongated connecting member comprising a flexible membrane on which conductive tracks are printed or affixed, the conductive tracks electrically connected to the sensing electrode and the back guard electrode of the sensor at one end and a connector at the other end.

3. The capacitive sensing system of claim 1, wherein the insulating layer comprises a first area where the sensing electrode is formed and a second elongated area on which the conductive tracks are formed.

4. The capacitive sensing system of claim 1, wherein the thin film structure further comprises a third conductive film comprising a shield electrode disposed on a second surface of the second insulating layer.

5. The capacitive sensing system of claim 4, wherein the thin film structure further comprises an elongated connecting member comprising a flexible membrane on which conductive tracks are printed or affixed, the conductive tracks electrically connected to at least the sensing electrode and the back guard electrode of the sensing electrode, the back guard electrode, and the shield electrode of the sensor at one end and a connector at the other end.

6. The capacitive sensing system of claim 4, wherein the sensor is connected to a triaxial cable, and wherein the shield electrode is electrically connected to an outer ground potential electrical conductor thereof.

7. The capacitive sensing system of claim 4, further comprising an AC power source for energizing the capacitive sensor, a signal processing circuit for processing signals from the sensor, and a triaxial cable for connecting the capacitive sensor to the AC power source and the signal processing circuit, wherein the cable has a center conductor, an outer conductor, and a shield conductor, the center conductor for electrically connecting the AC power source to the sensing electrode of the sensor, the outer conductor for electrically connecting to the back guard electrode of the sensor, and the shield conductor for electrically connecting the shield electrode of the sensor to a ground for the signal processing circuit at an end of the cable remote from the sensors.

9. The capacitive sensing system of claim 1, wherein the electrodes of the sensor are connected to corresponding conductors of the triaxial cable via a thin film connector element.

10. The capacitive sensing system of claim 9, wherein the electrodes of the sensor are connected to the conductors of the cable via conductive tracks on the thin film connector, the conductive tracks electrically connected to at least the sensing electrode and the back guard electrode of the sensor at one end and a connector) at the other end.

11. The capacitive sensing system of claim 10, wherein one or more of the conductive tracks electrically connected to the back guard electrode overlies the conductive track connected to the sensing electrode, the conductive tracks electrically connected to the back guard electrode being wider so that a peripheral portion extends out from the edge of the conductive track connected to the sensing electrode,

12. The capacitive sensing system of claim 10, further comprising one or more conductive tracks connected to a shield electrode of the sensor at one end and electrically connected to an outer ground potential electrical conductor of the cable at the other end.

13. The capacitive sensing system of claim 12, wherein one or more of the conductive tracks electrically connected to the shield electrode overlies the conductive track connected to the back guard electrode and the conductive track connected to the sensing electrode.

14. The capacitive sensing system of claim 1, wherein the insulating layers are shared with additional capacitive sensors.

15. The capacitive sensing system of claim 1, wherein the thin film structure is flexible.

16. The capacitive sensing system of claim 1, wherein the insulating layers comprise Kapton sheets.

17. The capacitive sensing system of claim 1, wherein the insulating layer comprises a pyrex substrate.

18. The capacitive sensing system of claim 1, wherein the insulating layer comprises a silicon substrate with an insulating coating.

19. A lithography system for exposing a target, the system comprising:

a projection lens system for focusing an exposure beam onto the target;

a moveable stage for carrying the target;

a capacitive sensing system according to claim 1 for making a measurement related to a distance between the projection lens system and the target; and

a control unit for controlling movement of the moveable stage to adjust a position of the target based at least in part on a signal from the capacitive sensing system.

8. A capacitive sensing system comprising a sensor having thin film structure, the thin film structure comprising a sensor having a first insulating layer, a first conductive film comprising a sensing electrode formed on a first surface of the first insulating layer, a second conductive film comprising a back guard electrode disposed on a second surface of the first insulating layer and a first surface of a second insulating layer, and a third conductive film comprising a shield electrode disposed on a second surface of the second insulating layer,

wherein the sensor is mounted to a structure and electrically connected to a triaxial cable, the shield electrode of the sensor being electrically connected to an outer conductor of the triaxial cable for making a connection to ground potential at an end of the cable remote from the sensors, and wherein the shield electrode of the sensor is not electrically connected to the structure at the sensor.