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Systems, devices, and methods including a dark-field reflected-illumination apparatus

  • US 20110194176A1
  • Filed: 10/25/2010
  • Published: 08/11/2011
  • Est. Priority Date: 02/10/2010
  • Status: Active Grant
First Claim
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1. A dark-field reflected-illumination apparatus, comprising:

  • a dark-field illuminator includinga body structure having an aperture and a plurality of waveguide assemblies, the plurality of waveguide assemblies including one or more electromagnetic energy waveguides configured to be coupled to at least one electromagnetic energy emitter, and the plurality of waveguide assemblies oriented to focus electromagnetic energy onto at least one focal region within the aperture at one or more angles of incidence relative to an optical axis of an optical assembly; and

    means for adjusting a dark-field illuminator distance relative to an optical assembly along an axis substantially parallel to an optical axis of the optical assembly.

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