SOLUTION TO OPTICAL CONSTRAINT ON MICROTRUSS PROCESSING
First Claim
1. A system for fabricating a radiation-cured structure, comprising:
- a radiation-sensitive material having a first refractive index;
a radiation source configured to generate a plurality of radiation beams for at least one of initiating, polymerizing, crosslinking, and dissociating the radiation-sensitive material; and
a mask disposed between the radiation-sensitive material and the radiation source, the mask having a plurality of substantially radiation transparent apertures, wherein the mask is formed from a mask material having a second refractive index, and at least one of a) an at least one normalizing surface is disposed between the radiation source and the mask, b) a refractive fluid having a third refractive index is disposed between the radiation source and the mask, and c) the refractive fluid having the third refractive index is disposed between the mask and the radiation-sensitive material.
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Accused Products
Abstract
A system for fabricating a radiation-cured structure is provided. The system includes a radiation-sensitive material having a first refractive index; a mask formed from a mask material having a second refractive index; and a radiation source. The mask is disposed between the radiation source and the radiation-sensitive material, and has a plurality of substantially radiation transparent apertures. The radiation source is configured to generate radiation beams for at least one of initiating, polymerizing, and crosslinking the radiation-sensitive material. The system includes at least one of a) an at least one normalizing surface disposed between the radiation source and the mask, b) a refractive fluid having a third refractive index disposed between the radiation source and the mask, and c) the refractive fluid having the third refractive index disposed between the mask and the radiation-sensitive material. A method for fabricating the radiation-cured structure is also provided.
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Citations
20 Claims
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1. A system for fabricating a radiation-cured structure, comprising:
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a radiation-sensitive material having a first refractive index; a radiation source configured to generate a plurality of radiation beams for at least one of initiating, polymerizing, crosslinking, and dissociating the radiation-sensitive material; and a mask disposed between the radiation-sensitive material and the radiation source, the mask having a plurality of substantially radiation transparent apertures, wherein the mask is formed from a mask material having a second refractive index, and at least one of a) an at least one normalizing surface is disposed between the radiation source and the mask, b) a refractive fluid having a third refractive index is disposed between the radiation source and the mask, and c) the refractive fluid having the third refractive index is disposed between the mask and the radiation-sensitive material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A system for fabricating a radiation-cured structure, comprising:
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a radiation-sensitive material having a first refractive index; a radiation source configured to generate radiation beams for at least one of initiating, polymerizing and crosslinking the radiation-sensitive material; a mask disposed between the radiation-sensitive material and the radiation source, the mask formed from a mask material having a second refractive index and having a plurality of substantially radiation transparent apertures; a refractive fluid having a third refractive index disposed between the mask and the radiation-sensitive material; and a prism having at least one normalizing surface disposed between the radiation source and the mask.
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14. A method for fabricating a radiation-cured structure, the comprising the steps of:
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providing a radiation-sensitive material having a first refractive index, a mask having a plurality of substantially radiation transparent apertures, the mask formed from a material having a second refractive index, and a radiation source configured to generate radiation beams for at least one of initiating, polymerizing and crosslinking the radiation-sensitive material; placing the mask between the radiation-sensitive material and the radiation source; at least one of a) disposing an at least one normalizing surface between the radiation source and the mask, b) disposing a refractive fluid having a third refractive index between the radiation source and the mask, and c) disposing the refractive fluid having the third refractive index between the mask and the radiation-sensitive material; and exposing the radiation-sensitive materials to a plurality of radiation beams through the radiation transparent apertures in the mask, whereby the radiation-cured structure is formed. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification