×

ANTI-ARC ZERO FIELD PLATE

  • US 20110197814A1
  • Filed: 12/30/2010
  • Published: 08/18/2011
  • Est. Priority Date: 02/15/2010
  • Status: Active Grant
First Claim
Patent Images

1. A vacuum processing chamber, comprising:

  • a backing plate disposed in a chamber body;

    a showerhead disposed in the chamber body and coupled to the backing plate;

    one or more showerhead suspensions electrically coupling the backing plate to the showerhead;

    an electrically conductive bracket coupled to the backing plate and spaced apart from the showerhead suspension, the electrically conductive bracket comprising a plate positioned substantially perpendicular to a face of the showerhead; and

    an electrical isolator having a first side contacting the plate of the electrically conductive bracket and a second side contacting the chamber body.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×