OPTICAL-LEVER CANTILEVER DISPLACEMENT DETECTING MECHANISM

• US 20110198517A1
• Filed: 02/11/2011
• Published: 08/18/2011
• Est. Priority Date: 02/18/2010
• Status: Abandoned Application

• Current Assignee: Olympus Corporation
• Original Assignee: Olympus Corporation
• Inventors: YOSHII, Toshihiro
• Application Number:
  US13/025,209
• Publication Number:
  US 20110198517A1
• Time in Patent Office: Days
• US Class Current: 250/552
• CPC Class Codes: G01B 11/002 for measuring two or more coordinates

Abstract

An optical-lever cantilever displacement detecting mechanism includes a support member, a cantilever cantilevered by the support member, a light source to emit a light beam, and an optical sensor to sense the light beam. The cantilever has a probe at its tip. The support member has a reflecting portion extending to face the cantilever with a space. The reflecting portion has a light transmitting portion to allow the light beam to pass therethrough. The cantilever and reflecting portion have reflecting surfaces on sides facing each other, respectively. The light beam emitted from the source undergoes repeated reflections by the reflecting surfaces of the cantilever and reflecting portion including reflections by the reflecting surface of the cantilever, passes through the light transmitting portion, and strikes the sensor. The sensor outputs a signal representing a change of the entry position of the light beam caused by a displacement of the cantilever.

Claims

1. An optical-lever cantilever displacement detecting mechanism comprising:

a support member;

a cantilever cantilevered by the support member;

a light source to emit a light beam; and

an optical sensor to sense the light beam,

the cantilever having a probe at its tip, the support member having a fixed reflecting portion extending to face the cantilever with a space from the cantilever, the fixed reflecting portion having a light transmitting portion to allow the light beam to pass therethrough, the cantilever and the fixed reflecting portion having reflecting surfaces on sides facing each other, respectively,

wherein the light beam emitted from the light source undergoes repeated reflections by the reflecting surface of the cantilever and the reflecting surface of the fixed reflecting portion including reflections by the reflecting surface of the cantilever, passes through the light transmitting portion, and strikes the optical sensor, and

the optical sensor outputs a signal representing a change of the entry position of the light beam caused by a displacement of the cantilever.

2. The optical-lever cantilever displacement detecting mechanism according to claim 1, wherein

one of the cantilever and the fixed reflecting portion includes a back-reflecting portion to reflect the light beam back in the opposite direction, the back-reflecting portion being located near the probe,

the optical-lever cantilever displacement detecting mechanism further comprises a beam splitter, the beam splitter directing, to the light transmitting portion, the light beam emitted from the light source, and directing, to the optical sensor, the light beam that has passed through the light transmitting portion, undergone the repeated reflections to reach the back-reflecting portion, been reflected back by the back-reflecting portion in the opposite direction, again undergone the repeated reflections, and passed through the light transmitting portion.

3. The optical-lever cantilever displacement detecting mechanism according to claim 1, wherein

one of the cantilever and the fixed reflecting portion includes a back-reflecting portion to reflect the light beam back in the opposite direction, the back-reflecting portion being located near the probe,

the fixed reflecting portion further includes a half mirror provided in the light transmitting portion, the reflecting surface of the half mirror being flush with the reflecting surface of the fixed reflecting portion, the half mirror contributing to the repeated reflections together with the reflecting surface of the fixed reflecting portion, the fixed reflecting portion further having, closer to a fixed end than the light transmitting portion, another light transmitting portion to allow the light beam to pass therethrough, and

the light beam emitted from the light source strikes the cantilever through one of the two light transmitting portions, undergone the repeated reflections by the reflecting surface of the cantilever, the reflecting surface of the half mirror, and the reflecting surface of the fixed reflecting portion, been reflected back by the back-reflecting portion, passes through the half mirror, and strikes the optical sensor through the other of the two light transmitting portions.

4. The optical-lever cantilever displacement detecting mechanism according to claim 3, wherein the probe extends across the reflecting surface of the cantilever.

5. The optical-lever cantilever displacement detecting mechanism according to claim 3, wherein the probe extends parallel to a longitudinal axis of the cantilever.

6. The optical-lever cantilever displacement detecting mechanism according to claim 1, wherein the cantilever is joined to the support member through a spacer defining the distance between the cantilever and the fixed reflecting portion.

7. The optical-lever cantilever displacement detecting mechanism according to claim 1, wherein the light source comprises a semiconductor laser.