METHOD FOR MAKING SEMICONDUCTOR APPARATUS AND SEMICONDUCTOR APPARATUS OBTAINED BY THE METHOD, METHOD FOR MAKING THIN FILM TRANSISTOR SUBSTRATE AND THIN FILM TRANSISTOR SUBSTRATE OBTAINED BY THE METHOD, AND METHOD FOR MAKING DISPLAY APPARATUS AND DISPLAY APPARATUS OBTAINED BY THE METHOD
First Claim
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1. A semiconductor apparatus comprising:
- a substrate; and
a laminate structure formed on said substrate that includes an insulating film made of a metal oxide and a semiconductor thin film,wherein,said insulating film and said semiconductor thin film are both crystallized.
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Abstract
A semiconductor apparatus having a substrate and a laminate structure formed on the substrate, the laminate structure including an insulating film made of a metal oxide and a semiconductor thin film, both the insulating film and the semiconductor thin film being crystallized.
35 Citations
8 Claims
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1. A semiconductor apparatus comprising:
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a substrate; and a laminate structure formed on said substrate that includes an insulating film made of a metal oxide and a semiconductor thin film, wherein, said insulating film and said semiconductor thin film are both crystallized. - View Dependent Claims (2, 3, 4)
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5. A display apparatus comprising:
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a substrate; a thin film transistor and a pixel electrode connected thereto on said substrate; and a laminate structure of a gate insulating film made of a metal oxide and a semiconductor thin film on said substrate, wherein, said gate insulating film and said semiconductor thin film are crystallized, respectively. - View Dependent Claims (6, 7, 8)
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Specification