SYSTEMS AND METHODS USING INTERFEROMETRIC OPTICAL MODULATORS AND DIFFUSERS

• US 20110199669A1
• Filed: 04/25/2011
• Published: 08/18/2011
• Est. Priority Date: 09/27/2004
• Status: Active Grant

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Chui, Clarence
• Granted Patent: US 8,184,358 B2
• Time in Patent Office: Days
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26
• CPC Class Codes: Y10T 29/49002 Electrical device making
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

Various embodiments include interferometric optical modulators comprising a substrate layer having a thickness between about 0.1 mm to about 0.45 mm thick and a method for manufacturing the same. The interferometric modulator can be integrated together with a diffuser in a display device. The thin substrate permits use of a thicker diffuser. The thinner substrate may increase resolution and reduce overall thickness of the inteferometric modulator. The thicker diffuser may provide increased diffusion and durability.

Claims

1. A display comprising:

a substrate having a first side and a second side; and

a plurality of interferometric light modulators disposed over the first side of the substrate, the plurality of interferometric light modulators having a pitch, each of the plurality of interferometric light modulators configured to be individually actuated to modulate light in response to an electrical signal, each of the interferometric light modulators including a resonant optical cavity,

wherein the substrate has a thickness between the first side and the second side that is less than approximately the pitch of the plurality of interferometric light modulators.

2. The display of claim 1, wherein at least some of the plurality of interferometric light modulators include:

a partial reflector; and

a movable reflector spaced from the partial reflector by a gap, the movable reflector configured to move with respect to the partial reflector to alter the gap to interferometrically modulate light, the movable reflector configured to move in response to an electrical signal.

3. The display of claim 2, further including an electrode configured to cause the movable reflector to move with respect to the partial reflector in response to the electrical signal, the electrode disposed on the same side of the gap as the partial reflector.

4. The display of claim 1, wherein the display is configured as a reflective display.

5. The display of claim 1, wherein the pitch of the plurality of interferometric light modulators is less than about 0.45 mm.

6. The display of claim 1, wherein the pitch of the plurality of interferometric light modulators is less than about 0.3 mm.

7. The display of claim 1, wherein the pitch of the plurality of interferometric light modulators is less than about 0.2 mm.

8. The display of claim 1, wherein the pitch of the plurality of interferometric light modulators is less than about 0.1 mm.

9. The display of claim 1, further including a diffuser.

10. The display of claim 9, wherein the diffuser is disposed over the second side of the substrate.

11. The display of claim 10, wherein the display is configured such that the first side of the substrate is distal to a viewer of the display and the second side of the substrate is proximal to the viewer.

12. The display of claim 9, wherein the display is configured such that light incident on the display passes through the diffuser before being incident on the plurality of interferometric light modulators.

13. The display of claim 9, wherein the diffuser is disposed over the first side of the substrate, and the plurality of interferometric light modulators are disposed over the diffuser.

14. The display of claim 9, wherein the diffuser has a thickness of less than about 0.4 mm.

15. The display of claim 9, wherein the diffuser includes a material having a lower density than the substrate.

16. The display of claim 9, wherein the diffuser is a composite including two or more components, wherein at least one of the two or more components provides diffusion to the diffuser.

17. The display of claim 1, further comprising:

a processor configured to process image data; and

a memory device in electrical communication with the processor.

18. The display of claim 17, further including a driver circuit configured to send at least one signal to the display.

19. The display of claim 18, further including a controller configured to send at least a portion of the image data to the driver circuit.

20. The display of claim 17, further including an image source module configured to send the image data to the processor.

21. The display of claim 20, wherein the image source module includes at least one of a receiver, transceiver, and transmitter.

22. The display of claim 17, further including an input device configured to receive input data and to communicate the input data to the processor.

23. A display comprising:

a substrate having a first side and a second side; and

a plurality of means for interferometrically modulating light, the plurality of interferometrically modulating light means disposed over the first side of the substrate, the plurality of interferometrically modulating light means having a pitch, each of the plurality of interferometrically modulating light means configured to be individually actuated to modulate light in response to an electrical signal, each of the interferometrically modulating light means including a resonant optical cavity,

wherein the substrate has a thickness between the first side and the second side that is less than approximately the pitch of the plurality of interferometrically modulating light means.

24. The display of claim 23, wherein the interferometrically modulating light means includes an interferometric light modulator.

25. The display of claim 23, wherein the interferometrically modulating light means includes:

a partial reflector; and

a movable reflector spaced from the partial reflector by a gap, the movable reflector configured to move with respect to the partial reflector to alter the gap to interferometrically modulate light, the movable reflector configured to move in response to an electrical signal.

26. The display of claim 25, further including an electrode configured to cause the movable reflector to move with respect to the partial reflector in response to the electrical signal, the electrode disposed on the same side of the gap as the partial reflector.

27. The display of claim 23, wherein the display is configured as a reflective display.

28. The display of claim 23, wherein the pitch of the plurality of interferometrically modulating light means is less than about 0.45 mm.

29. The display of claim 23, further including means for diffusing light.

30. The display of claim 29, wherein the diffusing means includes a diffuser.

31. The display of claim 29, wherein the means for diffusing light is disposed over the second side of the substrate.

32. The display of claim 29, wherein the means for diffusing light is disposed over the first side of the substrate and the plurality of interferometrically modulating light means are disposed over the diffuser.

33. A method of manufacturing a display, the display including a plurality of display elements having a spatial pitch, the method comprising, for each display element:

forming a movable reflector;

forming a partial reflector positioned at a distance from the movable reflector thereby forming an optical resonator cavity; and

forming an electrode configured to cause the movable reflector to move with respect to the partial reflector to alter the optical resonator cavity;

wherein the movable reflector, the partial reflector and the electrode are disposed over one side of a substrate, the substrate having a thickness of less than approximately the spatial pitch of the plurality of display elements.

34. The method of claim 33, wherein the spatial pitch of the plurality of display elements is approximately 0.45 millimeters or less.

35. The method of claim 33, further including providing a diffuser spaced apart from the partial reflector.

36. The method of claim 35, wherein the substrate has a first side and a second side, and the movable reflector, the partial reflector and the electrode are disposed over the first side of the substrate, the method including disposing the diffuser over the second side of the substrate.

37. The method of claim 35, wherein the substrate has a first side and a second side, the method including disposing the diffuser over the first side of the substrate and disposing the movable reflector, the partial reflector and the electrode over the diffuser.