METHODS OF FABRICATING LARGE-AREA, SEMICONDUCTING NANOPERFORATED GRAPHENE MATERIALS
First Claim
1. A method for forming a nanoperforated graphene material, the method comprising forming an etch mask defining an array of holes over a graphene material and patterning the array of holes into the graphene material, wherein the etch mask comprises a wetting layer in contact with the graphene material, a neutral layer comprising a copolymer disposed over the wetting layer, and a pattern-defining block copolymer layer disposed over the neutral layer.
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Accused Products
Abstract
Methods for forming a nanoperforated graphene material are provided. The methods comprise forming an etch mask defining a periodic array of holes over a graphene material and patterning the periodic array of holes into the graphene material. The etch mask comprises a pattern-defining block copolymer layer, and can optionally also comprise a wetting layer and a neutral layer. The nanoperforated graphene material can consist of a single sheet of graphene or a plurality of graphene sheets.
100 Citations
20 Claims
- 1. A method for forming a nanoperforated graphene material, the method comprising forming an etch mask defining an array of holes over a graphene material and patterning the array of holes into the graphene material, wherein the etch mask comprises a wetting layer in contact with the graphene material, a neutral layer comprising a copolymer disposed over the wetting layer, and a pattern-defining block copolymer layer disposed over the neutral layer.
- 11. A method for forming a nanoperforated graphene material, the method comprising coating a pattern-forming block copolymer onto a graphene material, exposing the pattern-forming block copolymer to a vapor atmosphere saturated with an annealing solvent for a time sufficient to allow the pattern-forming block copolymer to self-assemble into oriented domains, selectively removing at least some of the domains to form an etch mask defining an array of holes, and patterning the array of holes into the graphene material.
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13. A method for forming a nanoperforated graphene material, the method comprising:
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(a) forming an etch mask defining an array of holes on a substrate, wherein the etch mask comprises a wetting layer in contact with the substrate, a neutral layer comprising a copolymer disposed over the wetting layer, and a pattern-defining block copolymer layer comprising a plurality of ordered domains disposed over the neutral layer; (b) removing the wetting layer and the neutral layer from the etch mask and separating the pattern-defining block copolymer layer from the substrate; (c) transferring the separated pattern-defining block copolymer layer onto a graphene material; and (d) patterning the array of holes into the graphene material. - View Dependent Claims (14, 15)
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16. A method for forming a nanoperforated graphene material, the method comprising:
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(a) forming an etch mask over a graphene material, wherein the etch mask comprises a protective layer comprising an uncrosslinked polymer in contact with the graphene material, an etch stop layer disposed over the protective layer, and a pattern-forming block copolymer layer comprising a plurality of ordered domains disposed over the etch stop layer; (b) selectively etching away at least some of the domains to form an array of holes in the pattern-forming block copolymer layer, wherein the etch stop layer is comprised of a material that is resistant to the etchant used to etch away the domains; (c) patterning the array of holes through the etch stop layer, the protective layer and the graphene material in one or more subsequent etching steps; and (d) removing the remaining etch stop layer and protective layer from the graphene material. - View Dependent Claims (17, 18, 19, 20)
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Specification