CHARGED PARTICLE BEAM APPARATUS
First Claim
1. A charged particle beam apparatus comprising:
- a charged particle gun;
a specimen holder with a specimen placed thereon;
a charged particle optical system that irradiates the specimen placed on the specimen holder with charged particle beams irradiated from the charged particle gun;
a detector that detects secondary electrons generated by irradiation of the specimen with the charged particle beams;
an image processing unit that executes image processing of signals of the secondary electrons detected by the detector; and
a photoirradiation system capable of simultaneously irradiating an identical region of the specimen placed on the specimen holder with light of a first wavelength band, and light of a second wavelength band, differing in wavelength band from each other.
2 Assignments
0 Petitions
Accused Products
Abstract
It has been difficult to obtain pattern contrast required for inspecting a specific layer of a circuit pattern in a charged particle beam apparatus which inspects, by using a charged particle beam, the position and type of a defect on a wafer having a circuit pattern which is in semiconductor manufacturing process. At the time of inspecting the position and type of a defect on a wafer having a circuit pattern which is in semiconductor manufacturing process by using a charged particle beam emitted from a charged particle source (11), the wafer arranged on a holder (20) is irradiated with light in wavelength ranges different from each other from a light irradiation system (9), and at the same time, the wafer is irradiated with a charged particle beam. Thus, contrast of an image is improved and inspection is performed with high sensitivity.
25 Citations
20 Claims
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1. A charged particle beam apparatus comprising:
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a charged particle gun; a specimen holder with a specimen placed thereon; a charged particle optical system that irradiates the specimen placed on the specimen holder with charged particle beams irradiated from the charged particle gun; a detector that detects secondary electrons generated by irradiation of the specimen with the charged particle beams; an image processing unit that executes image processing of signals of the secondary electrons detected by the detector; and a photoirradiation system capable of simultaneously irradiating an identical region of the specimen placed on the specimen holder with light of a first wavelength band, and light of a second wavelength band, differing in wavelength band from each other. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A charged particle beam apparatus comprising:
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a charged particle gun; a specimen holder with a specimen placed thereon; a charged particle optical system that irradiates the specimen placed on the specimen holder with charged particle beams irradiated from the charged particle gun; a detector that detects secondary electrons generated by irradiation of the specimen with the charged particle beams; an image processing unit that executes image processing of signals of the secondary electrons detected by the detector; and a photoirradiation system that irraduates the specimen placed on the specimen holder with light, wherein the photoirradiation system includes a beam splitter for integrating respective optical paths of light of a first wavelength band, and light of a the second wavelength band, differing in wavelength band from each other. - View Dependent Claims (13, 14, 15, 16)
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17. A charged particle beam apparatus for inspection of a specimen having a structure comprised of third, second, and first layers that are stacked on top of each other in orderly sequence, said charged particle beam apparatus including:
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a charged particle gun; a specimen holder with the specimen placed thereon; a photoirradiation system that simultaneously irradiates light of a first wavelength band to be absorbed by the first layer, and light of a second wavelength band transmitting through the first layer, and the second layer to be absorbed by the third layer; a charged particle optical system that causes the first layer positively charged due to irradiation with the light of the first wavelength band, and the second layer negatively charged by the agency of photo electrons, the photo electrons being generated in the third layer due to irradiation thereof with the light of the second wavelength band, to be irradiated with charged particle beams irradiated from the charged particle gun; a detector that detects secondary electrons generated by irradiation of the first layer and the second layer with the charged particle beams; and an image processing unit that executes image processing of signals of the secondary electrons detected by the detector. - View Dependent Claims (18, 19, 20)
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Specification