Semiconductor Device and Method of Forming 3D Inductor from Prefabricated Pillar Frame
First Claim
1. A method of making a semiconductor device, comprising:
- providing a carrier;
mounting a semiconductor component over the carrier;
forming an inductor core over the carrier;
mounting a pillar frame over the carrier and semiconductor component, the pillar frame including a plurality of bodies with a first portion of the bodies being disposed around the inductor core;
depositing an encapsulant around the semiconductor component, plurality of bodies, and inductor core;
removing a portion of the pillar frame while leaving the first portion of the bodies to form inductor pillars;
forming a first interconnect structure over a first surface of the encapsulant;
removing the carrier; and
forming a second interconnect structure over a second surface of the encapsulant opposite the first interconnect structure, the first and second interconnect structures being electrically connected to the inductor pillars to form a 3D inductor.
3 Assignments
0 Petitions
Accused Products
Abstract
A semiconductor device is made by mounting a semiconductor component over a carrier. A ferromagnetic inductor core is formed over the carrier. A pillar frame including a plurality of bodies is mounted over the carrier, semiconductor component, and inductor core. An encapsulant is deposited around the semiconductor component, plurality of bodies, and inductor core. A portion of the pillar frame is removed. A first remaining portion of the pillar frame bodies provide inductor pillars around the inductor core and a second remaining portion of the pillar frame bodies provide an interconnect pillar. A first interconnect structure is formed over a first surface of the encapsulant. The carrier is removed. A second interconnect structure is formed over a second surface of the encapsulant. The first and second interconnect structures are electrically connected to the inductor pillars to form one or more 3D inductors.
-
Citations
25 Claims
-
1. A method of making a semiconductor device, comprising:
-
providing a carrier; mounting a semiconductor component over the carrier; forming an inductor core over the carrier; mounting a pillar frame over the carrier and semiconductor component, the pillar frame including a plurality of bodies with a first portion of the bodies being disposed around the inductor core; depositing an encapsulant around the semiconductor component, plurality of bodies, and inductor core; removing a portion of the pillar frame while leaving the first portion of the bodies to form inductor pillars; forming a first interconnect structure over a first surface of the encapsulant; removing the carrier; and forming a second interconnect structure over a second surface of the encapsulant opposite the first interconnect structure, the first and second interconnect structures being electrically connected to the inductor pillars to form a 3D inductor. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A method of making a semiconductor device, comprising:
-
providing a carrier; mounting a semiconductor component over the carrier; mounting a pillar frame over the carrier and semiconductor component; depositing an encapsulant over the semiconductor component and pillar frame; removing a portion of the pillar frame, wherein a first remaining portion of the pillar frame provides inductor pillars; forming a first interconnect structure over a first surface of the encapsulant; removing the carrier; and forming a second interconnect structure over a second surface of the encapsulant opposite the first interconnect structure, the first and second interconnect structures being electrically connected to the inductor pillars to form a 3D inductor. - View Dependent Claims (9, 10, 11, 12, 13)
-
-
14. A method of making a semiconductor device, comprising:
-
providing a carrier; mounting a semiconductor component over the carrier; mounting a pillar frame over the carrier and semiconductor component; depositing an encapsulant over the semiconductor component and pillar frame; removing a portion of the pillar frame, wherein a first remaining portion of the pillar frame provides inductor pillars; and forming a first interconnect structure over a first surface of the encapsulant, the first interconnect structure being electrically connected to the inductor pillars to form a 3D inductor. - View Dependent Claims (15, 16, 17, 18, 19, 20)
-
-
21. A semiconductor device, comprising:
-
a semiconductor component; an inductor core disposed in proximity to the semiconductor component; a pillar frame mounted over the semiconductor component and inductor core; an encapsulant deposited over the semiconductor component, pillar frame, and inductor core, wherein a portion of the pillar frame is removed to form inductor pillars around the inductor core; a first interconnect structure formed over a first surface of the encapsulant; and a second interconnect structure formed over a second surface of the encapsulant opposite the first interconnect structure, the first and second interconnect structures being electrically connected to the inductor pillars to form a 3D inductor. - View Dependent Claims (22, 23, 24, 25)
-
Specification