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TEST APPARATUS HAVING A PROBE CORE WITH A TWIST LOCK MECHANISM

  • US 20110204912A1
  • Filed: 01/20/2011
  • Published: 08/25/2011
  • Est. Priority Date: 01/20/2010
  • Status: Active Grant
First Claim
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1. A probe apparatus for testing a semiconductor device comprising:

  • a circuit board having a pattern of signal contacts and a pattern of guard contacts, the circuit board configured as a plate having a top side, a bottom side, and an opening through the top and bottom sides; and

    a probe core insertable into the opening and configured to be connected and disconnected with the circuit board, the probe core having a frame, a probe tile and a wire guide that support a plurality of probe wires, the plurality of probe wires having an end configured to probe a semiconductor device, and the plurality of probe wires such that each wire has a signal transmitting portion that matches a portion of a respective signal contact in the pattern of signal contacts, and such that each wire has a guard portion that matches a portion of a respective guard contact in the pattern of signal contacts; and

    a lock mechanism supported on the frame of the probe core,wherein the probe core is lockable onto the circuit board.

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