TEST APPARATUS HAVING A PROBE CORE WITH A TWIST LOCK MECHANISM
First Claim
1. A probe apparatus for testing a semiconductor device comprising:
- a circuit board having a pattern of signal contacts and a pattern of guard contacts, the circuit board configured as a plate having a top side, a bottom side, and an opening through the top and bottom sides; and
a probe core insertable into the opening and configured to be connected and disconnected with the circuit board, the probe core having a frame, a probe tile and a wire guide that support a plurality of probe wires, the plurality of probe wires having an end configured to probe a semiconductor device, and the plurality of probe wires such that each wire has a signal transmitting portion that matches a portion of a respective signal contact in the pattern of signal contacts, and such that each wire has a guard portion that matches a portion of a respective guard contact in the pattern of signal contacts; and
a lock mechanism supported on the frame of the probe core,wherein the probe core is lockable onto the circuit board.
2 Assignments
0 Petitions
Accused Products
Abstract
A probe core includes a frame, a wire guide connected to the frame, a probe tile, and a plurality of probe wires supported by the wire guide and probe tile. Each probe wire includes an end configured to probe a device, such as a semiconductor wafer. Each probe wire includes a signal transmitting portion and a guard portion. The probe core further includes a lock mechanism supported by the frame. The lock mechanism is configured to allow the probe core to be connected and disconnected to another test equipment or component, such as a circuit board. As one example, the probe core is configured to connect and disconnect from the test equipment or component in a rotatable lock and unlock operation or twist lock/unlock operation, where the frame is rotated relative to remainder of the core to lock/unlock the probe core.
30 Citations
14 Claims
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1. A probe apparatus for testing a semiconductor device comprising:
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a circuit board having a pattern of signal contacts and a pattern of guard contacts, the circuit board configured as a plate having a top side, a bottom side, and an opening through the top and bottom sides; and a probe core insertable into the opening and configured to be connected and disconnected with the circuit board, the probe core having a frame, a probe tile and a wire guide that support a plurality of probe wires, the plurality of probe wires having an end configured to probe a semiconductor device, and the plurality of probe wires such that each wire has a signal transmitting portion that matches a portion of a respective signal contact in the pattern of signal contacts, and such that each wire has a guard portion that matches a portion of a respective guard contact in the pattern of signal contacts; and a lock mechanism supported on the frame of the probe core, wherein the probe core is lockable onto the circuit board. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A probe core comprising:
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a frame; a wire guide supported by the frame, the frame being rotatable relative to the wire guide; a probe tile connected to the wire guide; a plurality of probe wires supported by the wire guide and probe tile, each wire includes an end configured to probe a semiconductor device, each wire includes a signal transmitting portion and a guard portion; and a lock mechanism supported by the frame such that the frame is rotatable relative to the wire guide and probe tile, wherein the lock mechanism is configured to allow the probe core to be connected and disconnected to a circuit board in twist lock and unlock operation through rotation of the frame relative to the wire guide and probe tile.
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14. A method for assembling a probe card onto a circuit board comprising
aligning a probe card with a circuit board, the probe card having a plurality probe wires, where each wire has a signal transmitting portion and a guard portion, and the circuit board having a pattern of signal contacts and a pattern of guard contacts; -
inserting the probe card into the circuit board; and rotating the probe card with respect to the circuit board to thereby lock the probe card onto the circuit board, wherein by the aligning step, each probe wire has its signal transmitting portion respectively aligned and in contact with a portion of a respective signal contact of the pattern of signal contacts and each probe wire has its guard portion respectively aligned and in contact with a portion of a respective guard contact of the pattern of guard contacts, and wherein by rotating step, a portion of the probe card is rotated relative to the circuit board, while the probe wires remain aligned with respect to the pattern of signal contacts and the pattern of guard contacts on the circuit board.
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Specification