MEMS DEVICES WITH MULTI-COMPONENT SACRIFICIAL LAYERS
First Claim
13-1. The method of claim 1, wherein the second material is selected from the group consisting of:
- Si3N4, Al2O3, SiO2, Cr, W, and Au.
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Accused Products
Abstract
Methods of forming a protective coating on one or more surfaces of a microelectromechanical device are disclosed comprising the steps of forming a composite layer of a sacrificial material and a protective material, and selectively etching the sacrificial material to form a protective coating. The protective coatings of the invention preferably improve one or more aspects of the performance of the microelectromechanical devices in which they are incorporated. Also disclosed are microelectromechanical devices formed by methods of the invention, and visual display devices incorporating such devices.
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Citations
23 Claims
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13-1. The method of claim 1, wherein the second material is selected from the group consisting of:
- Si3N4, Al2O3, SiO2, Cr, W, and Au.
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22. A method of manufacturing an electromechanical device, the method comprising:
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forming a composite layer on a surface of an electromechanical device, the composite layer comprising a mixture of a sacrificial material and a second material; and selectively removing the sacrificial material, relative to the second material, from the composite layer, thereby forming a coating on one or more surfaces of the electromechanical device, the coating comprising the second material, wherein forming the composite layer comprises sputtering a composite target, the composite target comprising the sacrificial material and the second material.
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23. A method of manufacturing an electromechanical device, the method comprising:
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forming a composite layer on a surface of an electromechanical device, the composite layer comprising a mixture of a sacrificial material and a second material; and selectively removing the sacrificial material, relative to the second material, from the composite layer, thereby forming a coating on one or more surfaces of the electromechanical device, the coating comprising the second material, wherein the coating is configured to dissipate an electrical charge between two or more components of the electromechanical device.
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Specification